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in-line nanopositioning stage / XYZ / piezo / 3-axis
in-line nanopositioning stage

Parallel kinematics In a parallel-kinematic multi-axis system, all actuators act directly on a single motion platform. This means that all axes can be designed with identical dynamic properties, which reduces the moved mass considerably. ...

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Physik Instrumente
single-axis nanopositioning system / 1-axis / multi-function
single-axis nanopositioning system
P-630 series

Resonant frequency to 3.25 kHz Travel ranges to 80 µm Small footprint and low- profile height Clear aperture with 30 mm diameter

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Physik Instrumente
wafer inspection and metrology nanopositioning system
wafer inspection and metrology nanopositioning system
P-750 series

1 nm lateral guiding accuracy Frictionless, high- precision flexure guiding system Load capacity to 10 kg Resolution <1 nm Direct metrology with capacitive sensors for highest precision Direct drive for Fast response Travel range ...

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Physik Instrumente
piezoelectric nanopositioner / in-line / XYZ / XZ
piezoelectric nanopositioner
P-611.Z series

Cost- effective mechanics / electronics system configurations Frictionless, high- precision flexure guiding system Outstanding lifetime due to PICMA® piezo actuators X, XY, XZ and XYZ versions

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Physik Instrumente
Z-axis nanopositioning stage / 1-axis / frictionless guided / compact
Z-axis nanopositioning stage
P-612.Z series

Stroke : 100 µm - 110 µm

Compact: Footprint 60 mm x 60 mm Very cost- effective controller / piezomechanics systems Frictionless, high- precision flexure guiding system Outstanding

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Physik Instrumente
in-line nanopositioning stage / 1-axis / crossed roller
in-line nanopositioning stage
ANT95-L series

Stroke : 25 mm - 100 mm
Speed: 0 m/s - 0.5 m/s

Aside from being the world's first nanometer-level positioning system, this ANT95-L Mechanical-Bearing Direct-Drive Linear Stage proves its speed, accuracy, resolution, repeatability, reliability and size over the years and is now with ...

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Aerotech
in-line nanopositioning stage / 1-axis / crossed roller
in-line nanopositioning stage
ANT130-L series

Stroke : 35 mm - 160 mm
Speed: 0 m/s - 0.35 m/s

The Aerotech ANT130-L series is a high performance drive designed for alignment, inspection, positioning, and measurement stations. The ANT130-L delivers unparalleled nanometer level precision in travels up to 160 mm. The ANT130-L ...

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Aerotech
rotary nanopositioning stage / motorized / 1-axis
rotary nanopositioning stage
ANT95-R series

The ANT95-R and ANT95-R-PLUS direct-drive rotary stages are efficient and reliable devices that offer impressive in-position stability of 0.005arc-sec, and sub 0.01arc-sec incremental motion performance. These are offered in two separate ...

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Aerotech
rotary nanopositioning stage / motorized / 1-axis
rotary nanopositioning stage
ANT130-R series

Compact and lightweight, the Aerotech's ANT130-R and ANT130-R-PLUS were engineered to deliver optimum performance and reliability with minimal space consumption and portable design. This product features 0.01 arc/ sec resolution and 0.005 ...

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Aerotech
in-line nanopositioning stage / XY / 2-axis / crossed roller
in-line nanopositioning stage
ANT95-XY series

Stroke : 25 mm - 50 mm
Speed: 0 m/s - 0.5 m/s

Aerotechs ANT range of stages are the world's first nanometer level positioning instruments that boast a higher than 22 mm travel. The The ANT95-XY crossed-rolled-bearing with linear motor and two-axis stage boast the same characteristics ...

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Aerotech
in-line nanopositioning stage / motorized / 2-axis / high-speed
in-line nanopositioning stage

piezo nanopositioning stage / vertical / 1-axis / fine focus
piezo nanopositioning stage
NZ200

Characteristics Orientation: Linear (Z axis) Application: Microscopy + close inspection Technology: Piezo motors Travel distance: 200 µm Description: Combining precision and speed, the NanoScanZ 200 from Prior Scientific offers ...

piezo nanopositioning stage / vertical / 1-axis / fine focus
piezo nanopositioning stage
NZ400

Characteristics Orientation: Linear (Z axis) Application: Microscopy + close inspection Technology: Piezo motors Travel distance: 400 µm Description: Combining precision and speed, the NanoScanZ 400 from Prior Scientific offers ...

piezo nanopositioning stage / vertical / 1-axis / fine focus
piezo nanopositioning stage
NZ200F

Characteristics Orientation: Linear (Z axis) Application: Microscopy + close inspection Technology: Piezo motors Travel distance: 200 µm Description: Combining precision and speed, the NanoScanZ 200 from Prior Scientific offers ...

piezo nanopositioning stage / vertical / 1-axis / fine focus
piezo nanopositioning stage
NanoScanZ 100

Stroke : 100 µm - 400 µm

Characteristics Orientation: Linear (Z axis) Application: Microscopy + close inspection Technology: Piezo motors Travel distance: 100 µm Description: Combining precision and speed, the NanoScanZ 100 from Prior Scientific offers ...

in-line nanopositioner
in-line nanopositioner
X-TREME™ series

Payload: 1100 lb

X-TREME™ Nano-Precision Linear Actuator • Linear Servo Motor Accuracy - .14 nm • Standard Encoder Resolution - 50 nm • Resolutions as low as 1.2 nm • Capacities up to 1,100 lbs • Straight line travel of .0004 in/in • ...

piezoelectric reclining platform
piezoelectric reclining platform
DTT35XS based on two pairs of APA35XS

The double tilt translator DTT is derived from 2 pairs of APA 35XS. There are 3 movement types that the unit is able to generate: X and Y (tilt) and Z (translation). It has a maximum load displacement of 35 µm. It measures 45*24 mm. ...

piezoelectric reclining platform
piezoelectric reclining platform
TT60SM

The product is TT60SM actuator with tilt translator is designed based on 2 APA 60SM actuators. It offers Max No-load displacement of 200 µm, blocked force of 240 µrad and unloaded resonance frequency of 118 N. This standard product offers ...

in-line nanopositioning stage / motorized
in-line nanopositioning stage
NT...V

Stroke : 10 mm - 120 mm

The IKO Nano Linear NT...V compact linear motor table possesses and impressive functional beauty through the arrangement of magnets and scale for the optical linear encoder to the movable steel table, and the stator coil and head for ...

in-line nanopositioning stage / motorized
in-line nanopositioning stage
NT...H

Stroke : 25 mm - 65 mm

The Nano Linear NT...H is a magnet positioning table that has a direct drive. It has magnets and also an optical linear scale that are incorporated into the moving table that is made out of steel. Then there are the stator coils and linear ...

in-line nanopositioning stage / motorized
in-line nanopositioning stage
NT...XZ

Stroke : 45, 10 mm

The direct drive moving magnet type 2-axes IKO nano linear NT...XZ is a positioning table. Its steel moving table has magnets and an optical linear scale that have been incorporated. Its steel bed has stator coils and a linear scale head. ...

in-line nanopositioning stage / motorized
in-line nanopositioning stage
NT...XZH

Stroke : 25, 10 mm

The NT XZH is a linear nano-positioning table that is integrated with the lube linear way L which acts as a guide for the table. It is operated through the means of a linear motor that joins the X and Z axis in one compact unit. The optimum ...

XY nanopositioning stage / motorized / 2-axis / high-speed
XY nanopositioning stage
PPS2020

Stroke : 0 mm - 200 mm
Speed: 0 m/s - 0.5 m/s

The PPS2020 is an electro-dynamical direct drive with air bearings. Path accuracy x,y = ± 1 μm Repeat accuracy = 200 nm Acceleration = 10 m/s² Payload = 5 kg Nano to Macro describes the positioning range for the nano positioning system ...

in-line nanopositioning stage / motorized
in-line nanopositioning stage
VZMM series

Stroke : 5 mm - 80 mm

REFERENCE VZMM4,5D005 DESCRIPTION Mini slider with high precision balls guiding, adjustable stroke by stopper or hydraulic shock absorber, magnetic detection

rotary nanopositioning stage / 1-axis / open-center / ball screw
rotary nanopositioning stage
KDT180-DC

Stroke : 60 mm

The item has Anodized surface with without backlash preloaded direction, made of stainless steel, without backlash ball screw (distance across 5mm/ pitch 1mm), 24v DC stepper engine, Rotary encoder (512 beats for every revolution), Gearbox ...

in-line nanopositioning stage / 1-axis / open-center / ball screw
in-line nanopositioning stage
KDT310-DC series

Stroke : 100 mm
Speed: 0.03 m/s

The KDT310-DC is an XY stage manufactured by Steinmeyer. It is driven by a motor with a voltage rate of 24V DC. The unit features an anodized surface, and stainless steel bearings. It can prevent backlash through the ball screw. The ...

rotary nanopositioning stage / motorized
rotary nanopositioning stage
MT63-DC

Stroke : 25 mm

The MT63-DC model assembled by Steinmeyer Mechatronik, is a nano-positioning stage that features an anodized surface. It is equipped with a backlash free bearings that is built with stainless steel components. This apparatus has 5mm / ...

in-line nanopositioning stage / piezoelectric / backlash-free / integrated recirculating ball bearing guide
in-line nanopositioning stage
NHL 84 serries

Stroke : 120, 45, 70, 270, 170 mm
Speed: 0.01 m/s

The NHL nano-hybrid linear stages are characterized by long travel ranges up to 270 mm with precise positioning in nanometer range. The established mechanism of spindle drive with stepping motor ensures high load capacities and high ...

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OWIS
in-line nanopositioning stage / piezoelectric / 1-axis / integrated recirculating ball bearing guide
in-line nanopositioning stage
NHL 124 series

Stroke : 80, 230, 290, 130 mm
Speed: 0.01 m/s

The NHL nano-hybrid linear stages is a kind of spindle drive that can hold extreme quantities and high level of torque. It has a diameter of 290 mm that allows accurate positioning in nanometer range, and it also has a piezoelectric actuator ...

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OWIS
in-line nanopositioning stage / piezoelectric / compact
in-line nanopositioning stage
NPX Series

The NPX Series consists of space saving and long travel linear stages which are piezo-based that offers nanometer resolution motion from 1 up to 3 axis. It is perfect for nanopositioning of small components including the mirrors, fibers, ...

piezoelectric nanopositioner / in-line / 3-axis
piezoelectric nanopositioner

This Bayside Motion Group Nano-Positioning Series - Piezo Ceramic Linear Motor Stages is a multiple-axis level with a .1µm resolution has a rating of 10-10 Torr. With extensive resolution piezo motors on the X and Y axes, it removes servo ...

hexapod nanopositioning system
hexapod nanopositioning system
70.42

Parallel-Kinematics for Precise Applications Based on our linear positioners, we have developed parallel-kinematic systems for manipulating objects in all six degrees of freedom (three linear axes and three rotary axes), called „SmarPod“. ...

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SmarAct GmbH
hexapod nanopositioning system
hexapod nanopositioning system
115.25

Parallel-Kinematics for Precise Applications Based on our linear positioners, we have developed parallel-kinematic systems for manipulating objects in all six degrees of freedom (three linear axes and three rotary axes), called „SmarPod“. ...

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SmarAct GmbH
in-line nanopositioning stage / motorized
in-line nanopositioning stage
NMX130-1030

NMX130-1030 NanoMover ★Translation Stage with Resolution in Nanometer range ★Monolithic stainless steel construction with electric discharge machining ★High precision frictionless flexure guiding system with motion amplification

XYZ nanopositioning stage / in-line / motorized / 3-axis
XYZ nanopositioning stage
LPMW

Stroke : 200 µm

Features Low profile XYZ nanpositioning Unique design for multiwell plates and incubators 200 μm range of motion (XYZ) Closed loop control High stability Optical microscopy, easy to retrofit Optical trapping experiments Fluorescence imaging Alignment Single ...

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Mad City Labs Inc.
in-line nanopositioning stage / motorized / 1-axis
in-line nanopositioning stage
OP series

Stroke : 30, 100, 65 µm

The MAD CITY LABS Nano-OP series nanopositioners are very robust, compact and can be used for different applications, offering combination of individual single axis stages into multi-axis systems. They feature a range of motion from 30, ...

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Mad City Labs Inc.
rotary nanopositioning stage / tilt / piezo
rotary nanopositioning stage
RXY3-276

Fast tip-tilt nanopositioning piezo stage with 3mrad range of motion. It is optimized for use with 1″, 2″ and 3″ mirrors. Categories: Mirror Steering Tip/Tilt Stages, Nanopositioning Piezo Stages, Optics Installation Drawings Product ...

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nPoint Inc
rotary nanopositioning stage / tilt / piezo
rotary nanopositioning stage
RXY3-410

Accurate tip-tilt nanopositioning piezo stage, designed for larger mirrors 2″ and above. Categories: Mirror Steering Tip/Tilt Stages, Nanopositioning Piezo Stages, Optics Installation Drawings Product Spec Info Print Specs Specifications Part ...

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nPoint Inc
Z-axis nanopositioning stage / vertical / piezoelectric / 1-axis
Z-axis nanopositioning stage
Model ZSA-1000C

Stroke : 1 mm

DSM’s nanopositioning piezoelectric ZSA-1000C stage features flexure-guided motion over a 1mm vertical travel range for scanning, metrology, and inspection processes. The stable and stiff kinematic design promotes parallelism in the output ...

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DSM
in-line nanopositioning stage / vertical / piezoelectric / 2-axis
in-line nanopositioning stage
Model XSA-0200C

Stroke : 200 µm

DSM’s nanopositioning piezoelectric XSA-0200C stage features flexure-guided motion over a 200 micron travel range for scanning, metrology, and inspection processes. The stage’s stable and stiff kinematic design promotes parallelism ...

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DSM
XY nanopositioning stage / motorized / 2-axis
XY nanopositioning stage
PXY Series

The PXY Series by Piezosystem Jena is an XY nanopositioning stage which is used to compromised piezo electric actuators into a flexure hinges systems. With these assembly, it enables the unit to work under a dynamic conditions having ...

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Piezosystem Jena
XY nanopositioning stage / motorized / 2-axis
XY nanopositioning stage
Scan XY 40

The Scan XY40 piezoelectric actuating podium can cover a range of 40 microns for each axis. The nano-dimensional piexo podium is engineered to meet the demands of 2D monitoring devices. The high performance monitoring podiums can present ...

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Piezosystem Jena
in-line nanopositioning stage / Z-axis / 1-axis / roller
in-line nanopositioning stage
NPE-200 series

Stroke : 0 mm - 13 mm

The nano-precision elevation stage NPE-200 offers the highest precision in our elevation stage series. Maximum positioning accuracy and high stiffness makes this stage especially suitable for lithography, fiber alignment and wafer inspection. ...

in-line nanopositioning stage / XYZ / piezoelectric / 3-axis
in-line nanopositioning stage
P-733 series

Stroke : 0 mm - 1000 mm

P-733 X V and XYZ piezo driven stages are fast and highly accurate nanopositioning and scanning systems. They provide a positioning and scanning range of 100 x 100 pm. 10 pm in Z together with sub- nanometer resolution and are equipped ...

in-line nanopositioning stage / piezoelectric / 1-axis / compact
in-line nanopositioning stage
PSX100.AL.CS

Stroke : 0 mm - 100 mm

The PSX100 stages are designed to seemlessly integrate into metrology applications, nano-motion machines, optical alignment, laser measurement, x-ray metrology, nano-automation, and research applications. The unique internal flexure design ...

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InsituTec
in-line nanopositioning stage / piezoelectric / 1-axis / compact
in-line nanopositioning stage
PSX20.TI.CS

Stroke : 0 µm - 25 µm

The X20 is a precision metrology stage designed for high bandwidth automation applications that require 1 nanometer in <1 ms settling times. Examples of applications include pico-scale metrology, nano-magnetic research, optical alignment, ...

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InsituTec