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Since 1976 Extrel has been building high performance Process Mass Spectrometers for a wide range of industries. The analysis speed and wide dynamic range our process mass spectrometers have made them the analyzer of choice for processes which have fast kinetics, dynamic composition changes, or have many sample points that need to be analyzed in a relatively short time period. The reliability, ease of use and innovative designs of our industrial analyzers have allowed Extrel become the process mass spectrometer market leader in many industries.
Today Extrel builds a wide range of Process Quadrupole Mass Spectrometers. Our MAX300 series are high performance gas analysis systems that can be used for everything from process development to pilot plant monitoring to full production control. These systems are the seventh generation of Process Mass Spectrometers for Extrel and they run the fifth generation of our powerful process software.
We back our system with 30 years of experience in process analysis and in-depth application knowledge. Our experience in installation, training and technical support will get you up and running quickly and easily and keep you up and running to keep your process at its best.
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Airsense EI (Compact)
Synchronized Double Mass Spectrometer
A complete gas analysis package designed to provide the customer with all-in -one analysis capabilities and to eliminate the cost and need for racks of multiple individual emission monitors
The Airsense Compact is a double mass spectrometer featuring the molecule Reaction (IMR) Mass Spec coupled with a Electron Pulse Ionization (EIMS) Mass Spec principle. Along with the vast number of trace components analysis capabilities of the Airsense MS, is the added capabilities of bulk gas analysis for N2, He, H2, CO2, and Ar at the same time.
Features include:
- High speed multi-component analysis, high selectivity, high flexibility
- On-line monitoring of raw bulk gas along with trace analysis
- High speed, rugged, and cost effective, eliminating the need for wide number of rack monitors
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MKS Mass Spectrometry gas analyzer products are innovative in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (RGAs), web-enabled RGA's, analytical equipment, and process RGAs and control software.
Vacuum Monitoring and e-Diagnostics
- Ultra High Vacuum (UHV)
- CVD Processes
- Vacuum Baseline RGA
- Ion Implant
- Photoresist Detection
- High-Pressure RGA
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Pfeiffer Vacuum supplies a broad portfolio of mass spectrometers, ranging all the way to high-perfomance mass spectrometers for plasma analysis.
A mass spectrometer can be used to analyze the composition of a gas mixture in a production system. Because in production processes it is not only important to know "how much" is contained in the mixture, but also "what" it is that is contained in it.
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QMS 403 C Aëolos® - Quadrupole Mass Spectrometer
The QMS 403 Aëolos® quadrupole mass spectrometer is a new compact mass spectrometer with a heated capillary inlet system for routine analysis of gases and, in particular, volatile decomposition products of thermal analysis. This system has been optimized for coupling to differential scanning calorimeters, dilatometers and thermogravimetric analyzers.
The high temperature of the gas transfer system and the absence of pressure reduction orifices practically eliminate condensation of decomposition products during thermal analysis experiments. This achieves a high detection sensitivity and facilitates quantitative detection of all identified gas components.
Via the inlet system with the fused silica capillary, other gas sources can be investigated with the QMS 403 C Aëolos® independent of thermal analysis; for that purpose, the QMS is operated with the self-contained software.
The concept of the NETZSCH thermal analysis instruments has been laid out from the start for coupling with gas analysis systems like the QMS 403 C Aëolos® or an FTIR system with a gas cell, through consistent optimization of the gas paths with complete heating from the furnace to the gas detector. This eliminates gas loss through condensation at cold spots and only very low carrier gas flows are sufficient for complete transfer.
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Since the introduction of the first Shimadzu Quadrupole GCMS system in 1972 Shimadzu has continuously improved its GCMS products. The current products range from the easy EI system for routine analysis purposes to the highly sensitive and flexible system GCMS-QP2010 which offers all possibilities for even the most advanced applications.
Shimadzu´s GCMS systems
QP2010 Plus: GCMS analysis for the highest demands and all application needs: ultimate sensitivity with highest flexibility
Autosamplers:
- AOC-20i Autoinjector
- AOC-20s Autosampler tray for up to 150 samples
- AOC-5000 Automatic injection system
Pyrolyzer:
- Py-2020iD from Frontier Lab
LabSolutions Software Series:
GCMSsolution the new up-to-date software for GCMS analysis. Comprehensive QA/QC functions make working in a GLP/GMP environment easy. Part of the Labsolutions software series for chromatography
CLASS Agent:
Data Management software with comprehensive support for FDA requirements
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Thermo Scientific TSQ Quantum triple quadrupole system is the only instrument that enables Highly Selective Reaction Monitoring (H-SRM) performance allowing you to analyze complex samples quickly and efficiently. HyperQuad quadrupoles yield higher ion transmission, minimizing false positives and maximizing sensitivity.
TSQ Quantum Access - Unsurpassed Price to Performance
The TSQ Quantum Access offers versatility with its best in class mass range (m/z 30- 3000), QED-MS/MS structural quantification scan mode, and H-SRM capability. With the ability to scan for more than 300 analytes in a single experiment and with fast positive/negative mode switching, the TSQ Quantum Access enables routine multi-residue screening. The common ion path and ion source shared by the TSQ Quantum product line allows for easy method transfer between the different platforms, a significant advantage in today's business environment.
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Triple-Quadrupole Mass Spectrometer Enhances Sensitivity in LC/MS -- Novel API Interface and Ion Optics Improve Performance
Redefining Benchtop LC/MS/MS
THe Varian 325-MS is a robust, reliable option for many applications, including environmental, food-safety, clinical research, and forensics. Designed to handle difficult small-molecule analyses, it offers a choice of ionization modes and scanning techniques to ensure you find the information you are looking for. The Varian 325-MS innovative technologies facilitate increased productivity in a high-throughput environment.
The Varian 325-MS Provides:
Accurate and reproducible results in difficult matrices
Highest sensitivity amongst comparable triple-quadrupole instruments (500 femtograms reserpine)
Easy-to-use vESI interface
Increased number of target analytes possible in multi-residue methods
Reduced need for front-end maintenance
It features a "vortex" API interface (vESI; petent pending) and "Gold-Guard" (patent pending) ion-optics that jointly enhance sensitivity, ruggedness and throughput. The higher sensitivity means you can analyze more compounds in a single run. The more rugged design means less downtime for cleaning the source. That adds up to an extremely productive solution.
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Agilent 6100 Series Quadrupole LC/MS systems put the sensitivity, selectivity, and information content of mass spectrometry into an amazingly compact package. Four models are available:
6110 - An economical entry to the power of LC/MS
6120 - The added productivity of ion polarity switching
6130 - A research-grade LC/MS with outstanding sensitivity
6140 - Maximum performance plus fast scanning for fast chromatography and high-throughput applications
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The AB SCIEX Triple Quad™ 5500 system is today’s most sensitive triple quadrupole mass spectrometer that is designed to deliver high levels of sensitivity and robustness for even the most complex and demanding matrices. The AB SCIEX Triple Quad™ 5500 exceeds the performance required by even the most demanding DMPK and ADMET studies and excels at multi-component quantitation required by environmental, targeted quantitative proteomics, clinical research, and food and beverage applications. Built from the ground up on new, fast eQ™ electronics, the system combines new and improved patented technologies with the powerful Analyst® software.
- Robust, high-throughput platform for all stages of pharmaceutical development.
- Excel at highly multiplexed peptide quantitation
- Unequalled accuracy and precision for quantitative analysis.
- Smaller footprint
- Lowest limits of detection available for DMPK and ADMET studies.
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The MAX LT Systems are high performance Quadrupole Mass Spectrometers mounted on 62 CF ( 41/2 inch) flanges. They are designed for the researcher who needs a real mass spectrometer but is on a limited budget.
The MAX LT system uses Extrel's high transmission 9.5 mm rod tri-filter quadrupole mass filter and the same powerful, flexible and easy to use Merlin Automation Software that our MAX systems do.
The MAX LT system are complete with EI Ionizer, Mass Filter, Detector, Power Supplies, Controller and Software.
The MAX LT systems are ideal for TPD studies, SIMS, plasma analysis, flow tube detection, catalysis studies and much more.
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The JMS-Q1000GC UltraQuad™ GC/MS is a highly sensitive, quadrupole Mass Spectrometer. Its high sensitivity, S/N>=120 (rms) for m/z 272 of 1 pg octafluoronaphthalene (scan mode) and S/N>=120 (rms) for m/z 272 of 0.1 pg octafluoronaphthalene (SIM mode), is unsurpassed and is actually 1.5 to 2 times that of conventional mass spectrometers. The resolution of this instrument is more than 3M (>=2000 at m/z 614 of PFTBA) which is obtained using the high-precision hyperbolic Quadrupole.
By adopting a high performance split flow turbomolecular pump, the JMS-Q1000GC UltraQuad™ develops extremely stable operation over an extended period of time.
The JMS-Q1000GC UltraQuad™ also has a removable ion source block which is easy to maintain and clean.
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The IMS1280 is based on a double focusing mass spectrometer with a large radius magnetic sector (585 mm). The secondary ion optics has been optimized to work at full transmission up to 6000 mass resolution. This very high transmission coupled with ion bombardment of oxygen or cesium allows the measurement of isotope ratios for species at trace level concentrations (U/Pb dating experiments) or for stable isotopes (oxygen or carbon). The automation level and new control of the optics parameters lead to an exceptional reproducibility on isotopic ratio measurements that is not achievable on any other SIMS instruments (0.1permil level external reproducibility).
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Long accepted as a tool for depth profiling thin films and insulating materials, Quadrupole Dynamic SIMS (D-SIMS) has become the surface analysis method of choice for characterizing ultra shallow implants used in semiconductor devices. Shrinking device geometries require ultra-shallow, high dose implantation of intentional dopants such as boron and arsenic and the use of thinner, highly controlled insulating layers (oxides and oxynitrides). These critical processes of modern semiconductor device fabrication are ideally suited to the analytical performance of Physical Electronics' ADEPT-1010 surface analysis instrument.
The ADEPT-1010 dynamic SIMS analysis instrument employs a unique secondary ion extraction system which provides high transmission with a quadrupole dynamic SIMS platform. High transmission yields low detection limits offering routine analyses of implant junction depth and dose. These critical factors in implantation can be measured with reproducibility of a few percent, consistent with the needs of the semiconductor industry. In addition, the ADEPT-1010 surface analysis instrument can be used to monitor the nitrogen content of nitrided oxides with thickness of 5nm and less.
The ultra-high vacuum environment of the ADEPT-1010 allows for depth profiling of low levels of oxygen and carbon in SiGe layers while maintaining excellent depth resolution and low sputter rates. This capability is important to the integrity of these high speed SiGe devices.
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The CAMECA SIMS 4600 is a full-wafer quadrupole SIMS with top performances in next generation semiconductor element depth profiling. Based on the experience gained with the SIMS 4550, it provides the same performances but add the 200mm or 300mm full wafer analyis and mapping capabilities (see example below). The wafers are handled horizontally and the geometry has been optimized in order to be compatible with:
- single normal incidence oxygen FLIG gun or
- dual beam configuration (normal oxygen FLIG and 60° cesium FLIG ion guns).
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Ion Chemistry
Quadrupole Mass Spectrometers and MS and MS/MS Components for Ion Chemistry Studies. Extrel has been building high resolution, high sensitivity instruments for ion chemistry studies in both research and industry since 1964.
- Drift Cell and Flow Tube Detection
- Plasma Monitoring
- Atmospheric Chemistry Studies
- Multi-quadrupole and MS/MS Systems
Extrel CMS builds a range of standard and custom systems and components for research and industrial ion chemistry applications. These include:
Add-on QMS Full Quadrupole Mass Spectrometers that you bolt on to existing systems to add high sensitivity, high resolution analytical capability.
Use one of our MAX 500 systems as the detection for Flow Tube and see everything from mass 1 to 500.
Components A full range of high performance Quadrupole Mass Spectrometry Components that you can use to build your own Ion Chemistry system or to improve the performance of an existing system. Extend the mass range of your current system or improve its sensitivity by an order of magnitude or more by adding our high transmission quadrupoles mass filters and a rock solid RF supplies to it. Add one of our 19 mm quadrupole mass filters and one of our 1.2 MHz RF power supplies as an injector quadrupole for your SIFT system
Special Systems Understand and improve your PECVD or Etch process by adding our plasma analysis ms modules to your system.
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Mass Spectrometry (MS) is one of the fastest-growing areas in analytical instrumentation. Magnetic sector and time-of-flight mass spectrometers (manufactured by JEOL) have very high stability, sensitivity, and resolution. These instruments are used in both quantitative and qualitative analysis, including high-resolution accurate mass measurements for the determination of elemental compositions. The use of mass spectrometry in support of synthetic, organic, and pharmaceutical chemistry is well established. However, mass spectrometry is also used in materials science, environmental research, and forensic chemistry. It has also evolved into one of the core methods used in biotechnology.
JEOL manufactures a wide range of magnetic sector mass spectrometers ranging from small bench top double-focusing magnetic sector mass spectrometers to larger tandem and hybrid mass spectrometers. JEOL also offers the new cost-effective high-performance AccuTOF™ API-TOF LC/MS system for qualitative and quantitative analysis.
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The new PHI TRIFT V nanoTOF surface analysis instrument is the next generation of PHI’s highly successful line of TOF-SIMS instruments which utilize the patented TRIFT analyzer. Several significant improvements have been introduced with the nanoTOF. The superior performance TRIFT analyzer has been combined with a revolutionary new sample handling platform. This innovative new sample handling platform was designed from the ground up specifically for TOF-SIMS, adding the flexibility needed to accommodate samples with complex geometries. In addition, improvements have been made in charge compensation and ion gun performance.
Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) provides sub-micron elemental, chemical, and molecular characterization and imaging of solid surfaces and thin films for products such as semiconductors, hard disk drives, polymers, paint and other surface coatings. Manufacturing companies in the chemical, semiconductor and pharmaceutical industries can use the nanoTOF to improve product performance, conduct failure analysis and manage process control. Time-of-Flight SIMS surface analysis instruments differ from Dynamic SIMS instruments in that they can analyze the outermost one or two mono-layers of a sample while preserving molecular information.
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The EM 640S is a mobile GC/MS system with laboratory analytical specifications designed for the fast and accurate, high sensitivity analysis of organic compounds in the environment.
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