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ANGSTROM SCIENCES magnetrons are recognized as the new standard for thin film sputtering. In addition to their advanced features such as profiled magnets, turbulent water flow, and solid stainless steel construction, they offer a host of other performance efficiencies as well.
· Ultra Compact Design
· Easily Configured For Internal Or External Mount
· Available For Target Diameters 1 Through 16 Inches
· Quick & Easy Target Changes
· Low Pressure / High Power operation
· High Rates & Performance
· Greater Target Utilization
· Greater Film Uniformity – routinely ±3 to ±5 % range
Cathode Styles
Indirect cooled/Standard
Direct cooled
Direct cooled/Indirect cooled
Ultra High Vacuum
High Temperature
High Power Pulsed
High Power RF
CD/DVD
Rotary
Diode
Magnetic Options
Standard
High Utilization
Balanced
Unbalanced
Mag II
High Rate
High Power
Low Pressure
Mounting Options
Internal
External
Assembly Options
Single
Cluster
Custom
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Dexter's patented circular magnetron guns (T-Guns™) have been specifically engineered for the demanding requirements of data storage media producers. Integration with a new system or retrofitting an existing system is facilitated by our innovative, patented design and control interface.
>Programmable speed: 0 to 500 RPM
>Superior mechanical robustness to withstand the high mechanical loading created by the high strength manget array/target interaction
>High radial anisotropy at ID, MD and OD during sputter
>Programmable magnet phasing
>Power: 120 VAC 60 Hz, 50Hz
>Optimized for dual cathode sputtering
>Designed to retrofit Intevac® 250B and Canon ANELVA 3010 systems
>Typical Deposition Rate: 61 A/kWsec at 3 kW
>Sputter power 3 kW
>Station includes two rotary mechanisms, vacuum chamber, target clamps, spacers and stand-offs
>Simplified, lower cost, rotating magnetron system
>Robust mechanical structure will work with low PTF SUL materials
>Programmable recipe variables include: rotational speed and phase angle
>Dexter target removal/load tool required
*Note that Dexter also offers the patented Z-Gun Magnetron Sputter Source.
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ANGSTROM SCIENCES magnetrons are recognized as the new standard for thin film sputtering. In addition to their advanced features such as profiled magnets, turbulent water flow, and solid stainless steel construction, they offer a host of other performance efficiencies as well.
·Ultra Compact Design - Ideal For Retrofit Applications
·Easily Configured For Internal Or External Mount
·Available For Target Diameters 1 Through 16 Inches
·Quick & Easy Target Changes
·Low Pressure / High Power operation
·High Rates & Performance
·Greater Target Utilization
·Greater Film Uniformity – routinely ±3 to ±5 % range
TOTAL COMMITMENT
At Angstrom Sciences, we design, engineer, and manufacture our own complete line of magnetron sputtering cathodes for thin film deposition. It is our core business, and we are totally committed to making sure it is done right, every step of the way. So we can assure you of the quality and reliability of every product you buy from us. We stand ready to provide you any help you may need in specification, installation, start-up, and service.
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Angstrom Sciences has developed a rotating cylindrical magnetron assembly that is compact, economical, and lightweight. And, by utilizing the patented technology already incorporated into our other magnetrons, we can provide you with excellent deposition, optimum target utilization (85%+), and inherent power savings.
The Onyx-Revolution has been customized for Flat Panel Display, Web Coating and Solar Cell applications.
Complete assemblies are available from 3”-6” (76.2 mm-152.4 mm) in diameter and up to 154” (4 m) in length.
Other features include:
High Magnetic Field provides a low operating voltage for reduced power requirements.
An optimized electrical transfer design to deliver high power while avoiding arcing as well as reduced brush wear and debris.
An NW quick connect water-to-vacuum seal for Quick target changes, shorter down times and increased production.
A universal and cost effective magnet design with customized turnarounds.
Lightweight, easily-serviced product with off-the-shelf components for low-cost, long-term investment and reliability.
For more information on our rotating cylindrical design, complete our application questionnaire or contact a product manager at 1.412.469.8466.
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Dexter R-Mag™ Magnetron,U.S. Patent 5,865,970
UP TO FOUR TIMES MORE PRODUCTIVITY THROUGH ENHANCED MAGNETICS
Our patented quadrature design produces higher fields than conventional magnetrons thus lowering your costs.
>The higher fields allow for thicker targets. Thicker targets can drastically increase run time between target changes while saving thousands in target costs.
>Magnet assemblies are built with carefully matched magnets that are calibrated to within +/- 1%.
>Magnet assemblies can be adjusted in any location to obtain the desired uniformity profile along the length.
>Magnet assemblies are designed for direct exposure with the cooling water.
>Magnets are mechanically protected with SS cladding.
>Magnet bar is designed with SS to minimize corrosion.
>Turn around portion of the assembly is designed for simple replacement. This allows us to work with the end user to optimize the turnaround erosion for maximum target utilization. This saves time and money! The replaceable turnaround also allows the end user to quickly repair and replace this portion of the bar if it becomes damaged.
>Readily adjusted to run with the larger ID targets
>Each magnet bar is individually mapped and certified to meet the uniformity requirements.
>Optional: Unbalanced or balanced magnetrons
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Electron multipliers (EMT) are used for the detection and measurement of electrons, charged particles such as ions, VUV radiation and soft X-rays. Hamamatsu electron multipliers have high gain and low noise, making them suitable for the detection of very small or low energy particles. An EMT has CuBeO dynodes for producing gain via secondary emission. The dynodes are connected by a built-in voltage divider (1M ohm per stage) and are supplied in an evacuated glass bulb. The first dynode can be replaced by a photocathode of CsI or KBr for use in VUV photometry. Microchannel Plates (MCP) can also be used as electron multipliers. EMTs are used in applications such as mass spectroscopy, field ion microscopy, electron or VUV spectroscopy, Auger spectroscopy, AES and ESCA.
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For processes that coat broad physical substrates or that need to achieve extremely high throughput, Angstrom Sciences offers the perfect solution. Our linear magnetrons deliver the same unparalleled performance that has made Angstrom Sciences the world leader in magnetron sputtering technology for the past two decades.
The Angstrom Advantage is fully incorporated into each of these state-of-the-art production tools. They operate at very low pressure and exceptionally high power, and they provide the perfect balance of uniformity, utilization and rate for any application.
Angstrom Sciences provides a full range of configurations to meet your production needs.
Sizes
Width 1.5” – 16” 38mm – 407mm
Length up to 20ft up to 6m
Cathode Styles
Indirect cooled
Direct cooled/Indirect cooled
Ultra High Vacuum
High Temperature
High Power Pulse
High Power RF
Diode
Magnetic Options
Standard
High Utilization
High Uniformity
Magnetic Stages I, II, III
Moving Magnetics
High Rate
High Uniformity
High Power
Low Pressure
Balanced
Unbalanced
Mounting Options
Internal
External
Assembly Options
Single
Multiple
Contact an Angstrom Sciences Product Manager at 1.412.469.8466 to discuss your specific operational requirements, or Request a Quote now.
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The photomultiplier provides extremely high sensitivity and ultra-fast response. Photomultiplier tubes (PMT) have high bandwidth and noise-free gain on the order of a million. This makes them ideal for the detection of extremely low light or short pulses of light. Photomultipliers can be used to detect photons from 115nm to 1700nm. A typical Photomultiplier consists of a photoemissive cathode (photocathode) followed by an electron multiplier and an electron collector (anode).
Hamamatsu offers the most complete range of head-on and side-on photomultiplier tubes from 3/8" to 20" in diameter.
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Toshiba offers a wide family of thermionic vacuum tube covers X-Ray tubes, X-Ray Image Intensifier, micorwaves tubes and a large variety of proportionnal counters.
Toshiba America Electronic Components, Inc. (TAEC) offers Magnetron Tubes for residential and commercial Microwave ovens as well as imaging system components for a variety of medical, dental and industrial applications. For the latter, the company has established itself as the single source for the complete image chain to meet the needs of all major applications. This product line includes x-ray tubes, a variety of image intensifiers (from 4- to 16-inches), optical units (lens, adapter and cover) and CCD cameras with up to 1K x 1K image resolution. All of TAEC's imaging components offer superior image sharpness, optimized uniformity and maximum image brightness.
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The X-Ray tube is the heart of any NDT x-ray system. A good tube is essential for getting the best image quality your system can deliver.
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KSI provides power supplies specifically designed for driving X-ray tubes in static or rotating applications, configured using proven designs:
- Generators and Power Supplies to 450 kV and 20 kW, rack mount or modular design
- Omniblock™ integrated X-ray tube and power supply in a single enclosure
- Single and double-ended designs to accommodate a wide variety of X-ray tube designs
- Soft switching resonant topologies for high efficiency, compact size, fast dynamic response, and low stored energy
- Analog, RS-232, or custom I/O interface
CW or pulsed output
- Closed-loop emission current control
Single or dual filament; fine and/or coarse control
- Low ripple, tight output regulation, and highly accurate repeatability
- Protected against open and short circuits, tube and cable arc's, overtemperature, overvoltage, and other fault conditions
- Universal input and PFC available
- Mechanical designs for stationary and rotating applications
- UL, TUV, CSA agency approval available; CE mark and/or RoHS compliance available
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KSI provides power supplies specifically designed for driving X-ray tubes in static or rotating applications, configured using proven designs:
- Generators and Power Supplies to 450 kV and 20 kW, rack mount or modular design
- Omniblock™ integrated X-ray tube and power supply in a single enclosure
- Single and double-ended designs to accommodate a wide variety of X-ray tube designs
- Soft switching resonant topologies for high efficiency, compact size, fast dynamic response, and low stored energy
- Analog, RS-232, or custom I/O interface
CW or pulsed output
- Closed-loop emission current control
Single or dual filament; fine and/or coarse control
- Low ripple, tight output regulation, and highly accurate repeatability
- Protected against open and short circuits, tube and cable arc's, overtemperature, overvoltage, and other fault conditions
- Universal input and PFC available
- Mechanical designs for stationary and rotating applications
- UL, TUV, CSA agency approval available; CE mark and/or RoHS compliance available
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KSI provides power supplies specifically designed for driving X-ray tubes in static or rotating applications, configured using proven designs:
- Generators and Power Supplies to 450 kV and 20 kW, rack mount or modular design
- Omniblock™ integrated X-ray tube and power supply in a single enclosure
- Single and double-ended designs to accommodate a wide variety of X-ray tube designs
- Soft switching resonant topologies for high efficiency, compact size, fast dynamic response, and low stored energy
- Analog, RS-232, or custom I/O interface
CW or pulsed output
- Closed-loop emission current control
Single or dual filament; fine and/or coarse control
- Low ripple, tight output regulation, and highly accurate repeatability
- Protected against open and short circuits, tube and cable arc's, overtemperature, overvoltage, and other fault conditions
- Universal input and PFC available
- Mechanical designs for stationary and rotating applications
- UL, TUV, CSA agency approval available; CE mark and/or RoHS compliance available
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Description :
The MX650 is a high intensity, monochromatized Al K? x-ray source package consisting of the XM-780 x-ray monochromator and the SAX-100 x-ray source. It is designed for optimal performance with the Scienta electron spectrometers as the spot size on the sample is dimensioned to give maximum intensity through the entrance slit of the analyzer. Furthermore, it is a very reliable source with high stability in photon flux and band width as well as low maintenance ensuring high up-time.&
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Features:
- More intensity on the sample: > 1011 photons/sec/mm2
- High brightness ULTRA FOCUSTMelectron optics (patent pending)
- Advanced HyperCoolTM anode (patent pending)
- Maximized up-time
- Extended filament lifetime
- Low cost of ownership
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Thermionic vacuum tubes, Cathode-ray tubes
