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The Atomic Force Microscope (AFM), has been the instrument of choice for three dimensional measurements at the nanometer scale. With the MFP-3D Stand Alone (MFP-3D-SA) AFM, scientists can now choose a sensitive and precise AFM with the lowest noise performance that also includes a complete scientific software environment. The MFP-3D-SA is ideal for many applications including physics, material science, polymers, chemistry, nanolithography, bioscience, and quantitative nanoscale measurements. The MFP-3D has the flexibility to acquire your data, analyze it, and even make publication-ready graphics.
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FRT Atomic Force Microscopes (AFMs) scan the surface of a sample using a very fine tip on the end of a microscale cantilever.
Atomic interactions between the tip and the surface lead to a deflection of the cantilever which is then detected by a piezoresistive element. Based on this effect, the AFM can measure the topography or roughness of a surface with very high resolution non destructively. The AFM can be used in different operating modes and thus allows for the investigation of further properties, such as electrical and magnetical forces or elasticity of a specimen.
topography measurement at very high resolution
automatic approach of the tip to the surface
sampling of surface areas by means of a piezoresistive elementcontact/non-contact mode
measurement of electrical and magnetic properties
measurement of lateral forces and elasticity1
measurement in liquids2
further operating modes upon request
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Affordable, Research-Grade AFM with Flexible Sample Handling
An economic extension of the XE-100, the XE-70 is Park Systems’ new AFM solution for budget conscious customers. Having a compact mechanical design, the XE-70 continues the innovative technology of the XE-series that sets it apart from conventional AFM. The XE-70 shares the same modes, options, and electronics as well as all other systems in the XE product line.
- Compact mechanical design
- 50 μm × 50 μm XY scan range
- 12 μm Z scan range
- Manual optics stage
- Complete new system with XE electronics
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The attoAFM I is a compact atomic force microscope designed particularly for applications at low and ultra low temperatures. The instrument works by scanning a cantilever accross a sample surface and by measuring its deflection with highest precision using a fiber based optical interferometer. Contact, non-contact, and modulation mode are applicable.
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N8 ARGOS
N8 ARGOSAFM / SPM the easy way
The N8 ARGOS is a compact and highly rigid stand for the NANOS AFM/SPM system. Equipped with a ultra precision vertical stage the AFM is approached with nanometer accuracy. Sophisticated algorithms provide a smooth and gentle probe approach. Accidental tip to sample contacts in non - contact measurement approaches belong to the past. Unique sliding X - Y stages provide the highest possible rigidity.
The stages are made of granite, a material with superior thermal behavior. Driven by high precision micrometer screws an exact positioning of the sample is provided. After reaching the measuring position on the sample the stage can be completely decoupled from the driving micrometer screws by simply turning them a few micrometers back. Thus, the granite stage elements are in direct contact over the entire running surface. This explains the superior drift - free behavior of this proprietary design. The straightforward, yet vibration insensitive stand provides the ideal setup for high accuracy AFM/SPM measurements down to a true atomic level.
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The XE-200 is an AFM with increased capacity that supports 200 mm wafer investigation. In addition to the precise scan performance provided by True Non-Contact mode, the XE-200 offers users an encoded XY stage that travels over the entire 200 mm x 200 mm sample area, an enlarged XY scan range of 200 μm x 200 μm, and a Z scan range of 25 μm. Also, the industrial-grade automation features of the instrument greatly minimize the user‘s required participation during system operation.
- Supports up to 8 inch wafer
- 200 μm × 200 μm XY scan range
- 25 μm Z scan range
- Industrial-grade acoustic enclosure with steel frame
- Fully motorized XY stage travels entire 200 mm × 200 mm
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The new Nanosurf easyScan 2 FlexAFM scan head makes measurements in liquid as simple as measuring in air. It is the most versatile and flexible AFM ever. Whether you want to operate the FlexAFM in air or in liquid, on metal surfaces or biological samples, it makes no difference to you as a user. This is true flexibility!
Key Features & Benefits
- True measurement flexibility in air and in liquid
- Flat, linear, and fast scanning thanks to the flexure-based scanner technology
- More measurement versatility with the FlexAFM’s liquid capabilities and added Lateral Force mode
- No more laser adjustment because of SureAlign™ optics
- Easy sample positioning and approach thanks to a clear top and side view in air and liquid
- Quick setup, easy handling, and immediate results because of Nanosurf’s “ease of use” concept and design
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The Nanosurf Nanite extends Nanosurf's new and innovative AFM scanner design to work-intensive industrial applications. When time and throughput are of utmost importance, the automated Nanite system is your answer.
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HDD Slider manufacturers can now reliably depend on Park Systems’ XE-PTR, a fully automated industrial in-line AFM for automatic Pole Tip Recession measurements on rowbar-level sliders. As most HDD manufacturers are turning to PMR (Perpendicular Magnetic Recording), sub-nano scale accuracy, repeatability and throughput are the keys to slider inspection for improving the overall yield. Matching the highest resolution AFM in the world with the lowest one gauge sigma value imaginable for repeatability and reproduction, the XE-PTR is the perfect solution for slider manufacturers who, until now, had very limited choice of industrial grade in-line inspection tools for HDD slider metrology. We, Park Systems, take pride in providing you with the metrology solution you have been longing for.
- Allowable Sample Size: Rowbars and Sliders
- Automatic Data Acquisition and Analysis of Sliders
- Designed Specifically for Manufacturing Facilities
- Automatic Tip Exchange (Optional)
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Ultra-high resolution microscopy places special demands on the equipment used to capture new information and reveal the secrets of the Nano-world.
The new S-5500 meets these with proven technology, combining high resolution and easy, reliable operation.
The S-5500 boasts a host of features and details, all designed to make high resolution microscopy and analysis that much easier
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Phenom™ brings the sub-micron world within easy reach of teachers and students
Engaging students of all ages with microscopy is easier than ever. Phenom achieves the ease of a light microscope with automated touch screen control, 30 second sample loading and only 15 minutes of training per user. Sample variety is limited only by imagination.
Phenom stimulates the development of investigative techniques, active learning and scientific inquiry skills by giving students an interactive, dynamic and fun learning tool.
Phenom™ is a high-resolution personal electron microscope with an optical camera for never-lost navigation. Its innovative touch-screen user interface and control knob let you quickly produce high-quality electron microscope images—with little or no training. Phenom can handle a wide range of samples with minimal preparation. Samples are loaded instantly with our patented low vacuum load-lock technology. SEM images are ready within 30 seconds. Phenom software lets users make precise on-screen feature measurements. Images are saved on a USB memory stick or network storage location for off-line analysis and distribution.
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MERLIN™
Analytical Power for the Sub-Nanometer World
-Nano Analytics
-Total Information
-Ease of Use
-Future Assured
MERLIN™ - analysis and high resolution in one
The MERLIN FE-SEM overcomes the conflict between image resolution and analytical capability. The core of MERLIN is the enhanced GEMINI II column which, with its double condenser system, achieves an image resolution of 0.8 nanometers. A sample current of up to 300 nanoamperes is available for analytical purposes such as energy and wavelength dispersive X-ray spectroscopy (EDS and WDS), diffraction analysis of backscattered electrons (EBSD) or the generation of cathodoluminescence.
The system supports the user with a wide range of detailed solutions for tasks that could not be adequately performed in the past. The foundation for this achievement has been laid by the Carl Zeiss "Complete Detection System". This consists of the in-lens SE detector for surface imaging, the in-lens EsB detector for material contrast and the AsB detector for widely dispersed backscattered electrons. The latter contain specific information on the crystal orientation of the sample.
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The answer to modern nano science challenges is the unique GEMINI® field emission SEM column, a sophisticated solution recognised by microscopists worldwide as the leader. The new SUPRA™ series, based on the 3rd generation GEMINI® column, offers a complete range of ultra high resolution FESEMs models to cover all fields of applications in nano technology, cryo, nano structural materials analysis and semiconductor development and failure analysis.
The key advantages of the GEMINI® FESEM column are superb resolution down to 0.1kV, high efficiency In-lens SE detector, minimal adjustments when changing operating voltage and low magnetic fields at specimen level. The SUPRA's unique variable pressure (VP) capability enables examination of non-conducting specimens without time consuming preparation. The versatile analytical ultra high resolution FESEM concept extends imaging and analytical resolution beyond previously achievable limits.
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SIGMA – Advanced Analytical Microscopy - Now available with VP Technology
The SIGMA, featuring GEMINI® technology provides outstanding imaging and analytical results from a field emission microscope.
The SIGMA is now available with variable pressure (VP) technology for exceptional imaging and analysis of non-conductive specimen. It is compatible with a wealth of accessories including the class leading Carl Zeiss BSD and VPSE G3 detectors for superior materials contrast and SE imaging in VP.
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The Hitachi S-4800 is a truly versatile platform comprising impressive high resolution performance, advanced detection technology, and a user interface that makes it possible to capture even the most short lived moments accurately and clearly.
It employs a semi-in-lens design for large sample accommodation while achieving ultra-high resolution comparable to performance only available with in-lens UHR SEMs.
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The ULTRA FESEM, based on the SUPRA%uF0D4 FESEM comprises a high efficiency, ultra high resolution In-column EsB detector which enables nano-scale compositional BSE imaging. The newly developed Energy selective Backscattered (EsB) detector represents the latest developments of the renowned GEMINI®technology. The ULTRA incorporates the GEMINI® In-lens SE detector for crisp topographic imaging and the EsB detector for clear compositional contrast. Simultaneous real-time imaging and mixing of both signals offers ultimate imaging capabilities. The EsB detector comprises a filtering grid which enables high resolution BSE imaging revealing previously unseen image details.
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Alba FLIM™ is a computer-controlled instrument specifically designed for confocal imaging applications using either single- or multi-photon excitation. The modular design of the instrument allows it to be easily upgraded to acquire Fluorescence Correlation Spectroscopy (FCS) data. Besides its most attractive features such as high sensitivity and fast acquisition speed, Alba FLIM™ comes with Vista, a powerful and user-friendly data acquisition and analysis software package.
Instrument Features:
Dual channel acquisition
Separate pinholes for each channel for higher resolution
Computer-controlled alignment of the confocal pinhole and optics
Choice between scanning mirrors or piezo-controlled XYZ stage
Single- and multi-photon excitation
Powered by Vista, a user-friendly software package for the acquisition of FLIM, FRET, RICS, and FCS
Alba FLIM can be combined with Alba FCS to a powerful, fully-equipped Alba - Confocal Spectroscopy and Imaging Workstation
Measurements:
Fluorescence Lifetime Images (FLIM)
Fluorescence Resonance Energy Transfer (FRET) efficiency images
Fluorescence images
Raster imaging correlation spectroscopy (RICS)
Steady-state polarization and ratio imaging
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The MicroTime 100 time-resolved microscope contains the complete optics and electronics for recording fluorescence decays in small volumes by means of Time-Correlated Single Photon Counting (TCSPC). The system is based on a conventional upright microscope body. With the MicroTime 100, decay times down to some picoseconds can be resolved. The system allows operation at laser repetition rates as high as 84 MHz and count rates up to several million counts/sec. An optional piezo scanner can be used for 2D imaging e.g. for Fluorescence Lifetime Imaging (FLIM)
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The New and Powerful Combination of FIB and GEMINI® Column
The NVision 40 CrossBeam® workstation units the imaging and analytical capabilities of the high resolution field emission GEMINI® SEM with the high performance SIINT zeta FIB column. Together with the new SIINT GIS supporting liquid, solid state and gaseous precursors as well as gas mixing technology and carbon free SiO2 deposition the NVision 40 represents a powerful tool for 3D nanoscale high resolution imaging, structuring and analytics. The NVision 40 features a dome type chamber design and a pendulumn vibration insulation system for enhanced stability. Numerous access ports for various detectors (EDS, EBSD, STEM, 4QBSO) as well as sample manipulation and probing systems ensure full support for all your analytical and micromanipulation needs. These versatile features and flexible upgrade possibilities make the NVision 40 a highly valuable platform for your today's and future nanotechnology needs.
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AURIGA®
Information Beyond Resolution
- Unique Imaging
- Advanced Analytics
- Precise Processing
- Future Assured
Does working with your sample cover more than just imaging of the surface? Would you also like to know about the chemical composition or the morphology of your sample? Are you curios about in-depth 3D volume characteristics? Or do you even plan to modify or process your sample?
AURIGA® the new CrossBeam® Workstation (FIB-SEM) from Carl Zeiss SMT exactly delivers all this - on a nanoscopic scale. Using the best-in-class FIB column and the proprietary GEMINI e-Beam column from Carl Zeiss, together with a completely new designed vacuum chamber for advanced analytics, AURIGA® assists you in obtaining the maximum information possible out of your sample.
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Nature has a tendency not to present the most decisive details for your research freely on the surface of your microscopy sample. For this reason, we have developed a special high-performance system combination which allows quick and reliable access to even hidden features and provides views into the 3rd dimension.
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ORION® PLUS
World Record Resolution changes microscopy paradigm
The world of microscopy just changed. The Carl Zeiss SMT ORION® PLUS Helium-ion-microscope just broke the world record for resolution. The ORION® PLUS microscope now delivers TEM-like resolution, on bulk samples, with SEM-like ease-of-use. This breakthrough in resolution truly puts the ORION® PLUS in a class of its own, providing an opportunity to see things you've never before seen.
These additional features of the ORION® PLUS add to its unequalled value as an imaging and analysis tool:
- Unique Ion Contrasts that yield information about materials not otherwise available;
- Incredible Surface Detail with contrast from only the top few atomic layers;
- High Energy Beam that is gentle on samples; and
- Charge Neutralization that allows imaging insulators at high magnification.
See for yourself. Contact us for a demo of the ORION® PLUS.
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This stage with a 15 cm movable granite object table and a positioning accuracy of 100 nm is the ideal solution for fully automated routine measurements, and gives the highest AFM measurement stability. With the push of a button, you can switch between a high resolution, conventional microscope with DIC function and the AFM scanner, thus combining a quick visual control with a high resolution AFM measurement. The repositioning problems of working with more examination methods are totally eliminated. Upon request, we can include other measuring equipment also.
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The LEAP Si™ Metrology System is a high-performance atom probe microscope providing 3D, atomic resolution, compositional imaging and analysis to research and industry. Materials are examined by removing and analyzing individual atoms. Atoms are removed by a combination of a high electrical field and either: (1) an ultra-fast voltage pulse or (2) an ultra-fast laser pulse. The LEAP Si employs patented innovations that unlock the power of the 3D atom probe to address previously unsolved measurement challenges in semiconductors, material science, and nanomagnetics. Key features include: largest field of view, highest data rate, excellent mass resolution, and simplified sample preparation using microtip arrays. With the LEAP Si measurements that would have taken months, or been completely impossible, can be accomplished in a matter of hours.
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Materials microscopy is following new rules. The basis: the newly developed systems platform Axio Imager from Carl Zeiss, designed for quality control, quality assurance, materials analysis, and for the development of new materials. Ideal for routine applications and research, Axio Imager is setting new standards in materials microscopy.
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Revolutionary automatic axis-aligment fucntions (Auto Beam Setting, Auto Axial Aligment, ect.)
Even better resolution of 10nm at 3kV
Real time, dual image display and signal mixing
5-axis motorized stage with high tilt (-20 ~ +90 deg.) a tall sample up to 80mm high applicable (Type 2)
Analytical specimen chamber with optimum geometry for simultaneous accommodation with EDS, WDS and EBSD
Saving floor space and electric power consumption due to TMP evacuation system
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Nanosurf's easyScan series has gained worldwide popularity through its affordability, portability, and ease of use, with hundreds of systems currently in use.
Now its successor, the easyScan 2, unites these three unique characteristics with a fully modular system design. Whether you need a teaching tool, a training Scanning Probe Microscope, or a research instrument, what you need is what you get.
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It features a flexible input lens system that collects a large acceptance angle from a well defined analysis area. This allows on the one hand to achieve extreme good countrates from large analysis areas, and thus the fast and time efficient collection of spectral information. On the other hand, the size of the analysis area can be reduced by an aperture to below 60µm diameter, which then allows dedicated small spot analysis of selected areas of interest. The hemispherical analyser is based on the EA 125 concept, which is known for its excellent energy resolution and low background noise.
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- Piezo Z-stage Design
- Scans and Positions Objectives with Sub-nm Resolution
- High Linearity and Stability with Direct-Measuring Capacitive Sensors
- Travel to 460 µm, Fast Response & Settling Time
- Frictionless Precision Flexure Guiding System
- Enhanced Guiding Precision for Better Focus Stability
- Ask about DIC Prism Holder Option
- Controller Compatible with Metamorph™ Imaging Software
- Quick Lock Adapter for Easy Attachment
P-725 PIFOCs® piezo Z-stages are long-travel, high-speed, piezo-driven microscope objective nanofocusing/scanning devices.
Despite the increased travel ranges (up to 460 µm), they are 20% shorter than P-721 units (see page see link), while providing sub-nanometer resolution. Equipped with ultra-precise, direct-measuring capacitive sensors, these devices are ideal for tasks such as surface metrology or deconvolution microscopy (Z-stack acquisition). The newly designed, frictionless, flexure guiding system provides enhanced precision for superior focus stability with fast response for rapid settling and scanning.
P-725 PIFOCs® are mounted between the turret and the objective, extending the optical path by only 12.5 mm (infini-ty corrected microscope re-quired; extension tubes are available to adjust path lengths of other objectives on the turret). Custom designs for positioning the complete turret are available on request.
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The Mobile S atomic force microscope is a whole new way to look at atomic force microscopy. Mobility. Ease of use. Sleek design. Modern and well-integrated software. Unsurpassed support and reliability. And a price much lower than you'd pay for a comparable AFM system.
World's first battery-powered AFM!
Announcing a new dimension in atomic force microscopy: the Mobile S battery-powered AFM.
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FEM microscopes, X-ray microscopes, Electron microscopes
