Air bearing positioning systems

Repeatability: 2.5 µm - 6.5 µm
Stroke: 50 µm - 275 µm
Speed: 30 mm/s - 50 mm/s

... x 50 mm • Extreme stability at standstill of 5 nm and better • Outstanding long lifetime due to the use of wear-free air bearings This very rigid XYZ gantry is specially designed for high-precision ...

Repeatability: 0.4, 0.7 µm
Load: 28, 10, 0.5 kg
Stroke: 3, 5 mm

... Ultra flat design of 990 x 1090 x 225 mm • Low-maintenance and low-particle by air bearing and direct drive With this aligner, second translational motions of ± 5 mm in the plane and a rotation around ...

Repeatability: 3 µm
Speed: 1 m/s

MULTI-AXIS SYSTEM WITH AIR BEARINGS Product information of this special project with X-Y linear motor stage system with air bearings Air-bearing ...

XYZ Universal Gantry | XY Linear Motor, Air Bearing | Z Ball Screw, DC Motor, Cross Roller | Travels up to 600 x 600 mm Universal XYZ positioning system ...

... inspection of large parts up to 450 x 1000 x 1000 mm | XY linear motor, air bearing | Z ball screw, DC motor Ultra-precise measurement of large and high parts This XYZ positioning ...

XY laser panel stage with travels up to 2500 x 1500 mm | Positioning system X linear motor, air bearing | Y ball screw, AC servo Air ...

Repeatability: 5.5, 2.5, 6.5, 4.5 µm

XYZ AFM gantry for wafer inspection, microscopy | travel up to 550 x 1550 mm | air bearing, ball screw, belt, stepper motor Highly stable AFM air bearing ...

Repeatability: 1, 2, 1.4 µm

... H-gantry and slides on air bearings. This unusual combination of transmitted light from above and below is particularly suitable for demanding transmittance measurements. The XYZ-Gantry system ...