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rotary vane vacuum pump / dry / single-stage / helium
rotary vane vacuum pump
LR/HR/UR series

Flow rate: 62 m³/h - 701 m³/h

... all pump stages making this series pump optimal for CVD and etch applications. ULVAC's ECO-SHOCK can be added to the LR pump for additional energy savings of up to 70% for any light processes ...

rotary vane vacuum pump / lubricated / single-stage / oil-sealed
rotary vane vacuum pump
GHD-031

Flow rate: 1.8, 2.16 m³/h
Ultimate vacuum: 0.01 mbar

OIL SEALED ROTARY VACUUM PUMP GHD-031 Wide range voltage motor and correspond to CE, cTUVus. Magnet coupling for no oil leakage from shaft seal and realized longer lifetime. Integrated check valve below ...

turbomolecular vacuum pump / dry / single-stage / compact
turbomolecular vacuum pump
TwisTorr 304 FS

Flow rate: 250, 220, 255 l/s

... high-vacuum pump provides superior performance, dependability and cost-effectiveness. It brings together Twistorr drag stage technology and Agilent Floating Suspension. High compression ratios are ...