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The FRT measuring systems series MFE (metrology front end) is
particularly suited to manufacturers of structured wafers, masks,
MEMS and similar products. Because of the very high cleanliness,
process and yield requirements, all tools are especially designed
for use in cleanrooms.
MFE systems measure critical dimensions and overlays on the
one hand and 3D topography or film thickness on the other.
All tools are metrological and comply with the necessary industry
standards such as the SECS II / GEM software interface.
Furthermore, the system is fully automated and equipped
with wafer cassettes and part carriers.
An EFEM and mini-environment for class 1 cleanrooms
rounds off the upper segment of the MFE tool series.
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Grinding relief quality measurement of threads and chamfers on taps:
The measuring device RELIEF EXPERT is designed for precise measurement of the grinding relief of threads and chamfers on almost all types of straight and spiral fluted workpieces.
- taps
- thread formers
- thread milling cutters
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On-line thickness measurement systems for:
* flat films and sheets, thermo-formed sheets made of PET, PVC, PUR, etc.
* coexruded film
* coated and uncoated rubber sheets
Thickness range: 10 µm ... 6 mm
Measuring uncertainty: 1 % of reading
The measuring system is unaffected by variations in density, humidity and colour of the material t be measured as well as unaffected by variations in temperature or vibrations of the surrounding fields.
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The Shallow Probe model LEXFAB-300 is a turnkey system designed to meet the needs for fully automated semiconductor fab application and currently used for the 90nm, 65nm and 45nm nodes.
The LEXFAB-300:
- gives Elemental Concentration AND Thickness of thin films, layers or ULE implants.
- is designed for Product Wafer analysis (measurement area from 10µm to 100µm) including enhanced Pattern recognition.
- is fully compatible with SMIF 200mm, Open Cassette 200mm and FOUP 300mm standards. SECS/GEM automation.
- meets factory-required host communication protocols. Fully compliant with SEMI standards.
- provides Full Wafer Analysis and Mapping (concentration and thickness uniformity).
- is based on a Non-destructive technique.
- allows a high throughput.
- guarantees a high uptime, reliability and stability, ensuring documented long term tool matching.
- has an easy-to-use User Interface with dedicated recipes.
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Corning is a leading, global supplier of optical materials, high performance precision optics, optical-based metrology instruments and technical microlithography solutions for the semiconductor industry. Its core technical expertise includes fused silica and fluoride crystals, materials and processing, optical-based metrology instrumentation and high performance optics through Corning Tropel®.
Recognized world-wide in precision optical subsystems and advanced form metrology instrumentation, Corning Tropel provides rapid, accurate full-form measurement of precision flat and cylindrical surfaces for the semiconductor, data storage, automotive and industrial markets. Custom-designed, high performance precision optic components enable applications for wafer, photomask and inspection equipment suppliers, and are designed for systems from ultra-violet (UV) to near infrared (IR).
Advanced Metrology Research and Testing Exceeds Customer Expectation
Our commitment to semiconductor metrology research and testing is significant and addresses an industry-wide need for precise performance and predictability over the lifetime of materials. Corning’s advanced interferometry equipment enables precision measurements and quality assessments that meet and/or exceed customer requirements for quality products and solutions. Our world-class manufacturing facilities, leading-edge metrology equipment and in-house lens-making capabilities, continues to be known for the exceptional quality, performance and reliability of its precision optics
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ETA-ARC-AT: Capabilities and advantages
Cost reduction:
- Non-destructive measurement
- No roughening or blackening needed
- No witness piece required
- Measure the actual lens
- Contactless measurement -> no damage
Competitive advantage:
- 100% QC possible
- Check coating homogeneity
- Achieve perfect color matching
fore more information: www.get100.eu
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The FRT MicroGlider® is the highly precise, multi-sensor platform
measuring system from FRT intended for especially accurate
measuring applications. A linear motor driven, non-contact
air bearing x-y stage guarantees best precision motion during
stage movement. Hence the MicroGlider® measures profile,
topography, roughness, and coating thickness with further
enhanced accuracy. The MicroGlider® is also equipped
with a CCD camera for easy sample positioning and can
automatically perform predefined measurements.
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Description:
Nowadays, the properties of surface topographies are increasingly influenced by new processing methods and new materials.
The traditional profile stylus method is often not adequate to characterize the functional behavior of surfaces. Three-dimensional recording and evaluation are required. Soft and thin-walled materials also require non-contact measurement.
Moreover, ever higher levels of surface quality are being achieved, greatly increasing the requirements placed on measuring systems in terms of resolution and measuring accuracy.
The MarSurf WS 1 satisfies all these requirements:
- Vertical resolution 0.1 nm (.004 µin)
- Three-dimensional measurement and evaluation in only a few seconds
- Compact measuring station configuration for the workshop and laboratory
- MarSurf XT 20 software
- Topographical evaluation software on the fully standardized and powerful MarWin software platform
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Scanning Frames are a critical factor in making a profile measurement. If the material is not presented to the sensor in an accurate and repeatable way, you will not be able to get the most accurate and repeatable measurement. This is why NDC places emphasis on engineering and producing the most accurate scanning frames in the industry. Our scanning frames' registration performance, coupled with our sensors' accuracy and repeatability, give you the most accurate profile measuring tool available.
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Atomic Force Microscopy
Atomic Force Microscopes (AFMs) scan the surface of a sample using a very fine tip on the end of a microscale cantilever.
Atomic interactions between the tip and the surface lead to a deflection of the cantilever which is then detected by a piezoresistive element. Based on this effect, the AFM can measure the topography or roughness of a surface with very high resolution non destructively. The AFM can be used in different operating modes and thus allows for the investigation of further properties, such as electrical and magnetical forces or elasticity of a specimen.
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Features :
- Roughness and contour in a single stroke You need only half the time and your work is faster, more reliable and more efficient.With just one measurement, you have all the results for
roughness and contour characteristics at a glance. So you have more time for other things!
- State-of-the-art measuring technology for small tolerances. The integrated optical measuring system provides pinpoint accuracy over a broad measuring range and at maximum resolution. You can process jobs with low tolerances and thus tackle new challenges head-on.
- Innovative tracing arm concept for maximum stability The tracing arms, which have been designed using bridge-building techniques, ensure maximum rigidity, low-oscillation measurements and unwavering precision. So you can build your own bridges - to new dimensions of flexibility!
- Tracing arms with magnetic connection The magnetic mount ensures excellent system protection and a long service life.
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The PC 2200 is a state of the art flexible electronic/air column capable of operating with air gauging products and measuring probes. The advanced new column contains a multitude of measuring functions including static and dynamic gauging, classification grading, probe mixing, (A+B), (A-B), etc.
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Digitronic Height Gauge - 196 Series
Heavy duty square twin beams
Handwheel for ease of use
ABS/INC measurement
Large LCD display
Inch/mm conversion
Positive lock carbide scriber
Includes indicator holding bar
Supplied in moulded case
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Code: Art. 32/110
Digital height gauge
Digital height gauge in hardened stainless steel. 5 figures liquid crystal display with minus sign. State-of-the-art technology. Slider with micrometric adjustment. Scribing point with widia tip. Manual on/off button. Set to zero in any position. Preset values keys. RS232C data output. Inch/mm conversion. Serial number. Manufactured as per DIN 862.
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Precision sensors for fast, accurate acquisition of component dimensions and surface data.
The world's leading range of touch-trigger and scanning measurement systems for co-ordinate measuring machines (CMMs), plus the revolutionary Renscan5%u2122 5-axis scanning technology.
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The CMS non-contact capacitive based hole and countersink measurement system has been established as the benchmark in measuring critical holes for military and commercial aircraft manufacturers around the world. Based on its ease of use, speed (measurement accomplished in a few seconds) and extreme accuracy ( /- 5 microns),
It has gained in popularity at various Airbus locations throughout Europe. The CMS system is particularly well adapted to the measurement of tapered holes based on its multi-sensor (48-sensor) approach to inside diameter mapping.
The addition of the CMS product line is a natural extension for Capacitec as they are currently the market leader in the supply of capacitive non-contact gap and displacement measurement sensor systems to the Aerospace market.
For further information, please contact :
Capacitec Europe
16 Rue Sejourné- 94044 Creteil – France
(33) 1 43 39 48 68
eurosales@capacitec.com
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MEASURING PLUG FOR INSPECTING BORE DIAMETERS
M1 Star is a highly advanced line of measuring plugs developed by TESTAR, a MARPOSS division, for inspecting bore diameters.
The M1 Star MBG (Mechanical Bore Gauge) is the ideal manual instrument for precision measuring of inside diameter, ovality or taper.
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General description
- Modular design, universal bore gauge system for larger bores (M5678 and M68-FB)
- Large measuring range (± 1.5 mm)
- Application range: Ø 26.3 mm to 330 mm/1.03" to 13" (Ø 38.5 mm to 348 mm/ 1.5" to 13.7" for blind bore FB)
- Calibration in setting master or micrometer
- Adaptability to most bore gauging applications
- Blind bore type (FB) in standard programme
- Tungsten carbide contact points
- Holders and depth extensions are manufactured from temperature stabilised material, ensuring minimal gauging errors.
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Digimatic Height Gage:
- High-efficiency height measurement with the optional dedicated probe
- Measuring range: up to 1000 mm with 3 models
- Universal type that places emphasis on the ease of operation.
- Measuring range: up to 1000 mm with 3 models
ABS Digimatic Height Gage HDS:
- Provided with the ABS function of well-established rotation drive handle.
- Measuring range: up to 600 mm with 2 models
Square column with the ABS function
- Measuring range: up to 1000 mm with 2 models
Standard Height Gage:
- Universal type of square column height gages
- Measuring range: up to 1500 mm with 5 models
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The Digimar Height Measuring Instruments are ideal partner for the workshop, on the production line or in the inspection room, they are Simple to use, Fast and Accurate.
Mahr offers a complete product range. From the simpliest Height and Scribing Measuring Instruments to the high end motorized measuring station with 2D measuring functions.
Digimar 817 CLM Quick Height
The new Height Measuring Instrument Digimar 817 CLM with the innovative Quick Mode. Highly accurate rapid measurements, a wide range of measuring and evaluation possiblities and excellent operator comfort.
- Revolutionary, simple and rapid measurement with the Quick Mode
- Ergonomic operating and display unit
- Versatile application for variable measurement tasks
- Wide range of statistical evaluations are possible
- Available in 3 sizes and 2 operating display units
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Starrett Height Gages are available in a variety of styles, sizes, readouts and accuracies. Accuracies are available to .000050" on our Digi-Chek® Series. Standard height measurements are available to 85"
Electronic Height Gages
No. 3752 Series
The 3752 Electronic Height Gage is a full featured, versatile and economic
solution for most height measurement applications.
All measuring information from these tools can be entered directly into Starrett Data Collection Systems for analysis, data collection and hard copy documentation.
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Leica T-Probe is a “Walk-Around” armless wireless probing device for probing of hidden, hard-to-reach points and measuring of up to 9 cars in one setup with minimal setup times, sets new standards by increasing accuracy, offering a ten-fold increase in point acquisition rate and providing user-assignable multi-function buttons
Small, light, user-friendly, and more accurate than any other hand-held probe in the world, the Leica T-Probe gives you more than 6 Degrees of Freedom: It gives you the right way to measure. Now featuring longer styli, Leica T-Probe reaches up to 30m (98ft) in any dimension.
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The ML10 Gold Standard laser represents the ultimate in calibration for machine tools, co-ordinate measuring machines (CMMs) and other position and motion critical systems. In combination with the extremely accurate EC10 environmental compensation unit, the system boasts ±0.7 ppm linear measurement accuracy.
The ML10 Gold Standard system can improve performance through targeted maintenance and can correct linear positioning errors using error compensation.
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Versatile system for geometrical measurements. Thoroughly proven reliability and user-friendly design make it easy for you to measure almost anything. Simply add laser transmitters and other accessories to suit your purposes.
Typical applications: Straightness, flatness, squareness, parallelism and spindle direction in machine tools, mechanical constructions, etc.
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The MCV-2002 “Two interferometers operating at the same time” utilizes a dual beam laser head module to accomplish simultaneous linear and angular (pitch or yaw, straightness, flatness) calibration of axes on machine tools, CMMs, or X-Y tables as well as surface plates. The software enables the operator to automatically collect linear and angular positions simultaneously or angular data on the fly in accordance with various industry standards. Material temperature, air temperature and air pressure variations are automatically compensated. linear measurement range of 33-feet (10-m) with 1 microinch (10nm) resolution, and an angular measurement range of 16-feet (5-m) with 0.2-arcsec angular resolution. Optional ranges up to 200-feet (60-m) linear and 100-feet (30-m) angular are also available upon request..
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