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INFICON Stiletto® is a scanning-laser particle detection system that finds yield-limiting particle contamination in real time on every wafer. Its increased particle detection area and accurate particle counting and sizing, enable yield and productivity improvements for the most advanced semiconductor processes.
INFICON Stiletto is capable of in situ metrology and process control, enabling yield and productivity improvements for the most advanced semiconductor processes. Stiletto is the first in situ particle monitoring system to be fully integrated with the process tool. When combined with parametric tool data, particle counts can be overlaid with equipment status to allow engineers to identify the exact time and cause of particle formation. The ability of INFICON Stiletto to detect particles during every run of every wafer provides unprecedented protection against defect-induced yield loss.
INFICON Stiletto resonant scanner continuously monitors a much larger volume than the stationary laser beam systems used in existing in situ particle monitors, so Stiletto is able to provide statistically significant count rates for process control. In addition, repeatedly scanning the same volume permits auto-correlation, an advanced signal processing technique that virtually eliminates false counts. This combination of cutting-edge technologies delivers submicron sensitivity that detects "killer particles" while avoiding nuisance events. So you get reliable fault detection for every wafer, every run, every time.
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General description:
The air particle counter PSS air is applied for the monitoring of the particle concentration in clean rooms, production sites and assembly facilities. The sensor can be operated as a stand-alone unit in connection with an available control system or within a network system.
Low-cost installation because of integrated pump
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Icount PD
A new generation of detectors of particles on which industry can "count"
Technical description:
Technology of luminous screening per laser diode recognized by industry
Approved calibration, methods on line
Indicators LED for levels detected ISO & NAS
Technology entirely PC compatible /PLC
Simple connection by catches of M16 test or with an interface by sensors STI on line.
Advantages:
The most modern technology in the field of the analysis of the contamination by solid particles
Trace program of preventive maintenance
Analyzes on site combined with the laser technology
Simple communication protocols for the configuration of use and exploitation
Ecological nylon material reinforced with glass fiber
Accreditation IP66
Economic solution.
Applications:
Mobile sylviculture
Industrial facilities, paper Paper & pulp - Steel-works - energy Conversion
Transformation of alternative energy - Systems of transmission for wind mills
Installations of military support on the ground - testing grounds & quality control.
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Icount Particle Detector
The Icount Particle Detector from Parker represents the most up-to-date technology in solid particle detection. The design dynamics, attention to detail, and small size of the permanently mounted, on-line particle detector brings a truly innovative product to all industry. The laser based, leading-edge technology is a cost effective market solution to fluid management and contamination control.
Features and benefits of the Icount PD include:
• Independent monitoring of system contamination trends.
• Early warning LED or digital display indicators for Low, Medium and High contamination levels.
• Moisture % RH LED indicator (optional).
• Cost effective solution in prolonging fluid life and reducing machine downtime.
• Visual indicators with power and alarm output warnings.
• Continuous performance for dependable analysis.
• Hydraulic, phosphate ester & fuel fluid compatible construction.
• Self diagnostic software.
• Fully PC/PLC integration technology such as: RS232 and 0-5 Volt, 4-20mA.
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