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A walking drive principle
Imagine an electric motor of approximately the same size as an ant, but 1,000 times as strong. Then imagine that it moves like an ant, despite being constructed in one solid piece. Still, it can actually walk, step by step, one pair of legs at a time.
What is really unique with the Piezo LEGS® motor is its ability to synchronize the movement of each pair of legs - just like an ant. What is obvious in nature is not necessarily as obvious to an electric motor.
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The PiezoWave™ motor consists of very small piezo ceramic elements that are surface assembled on a flexible printed circuit board. The design enables us to manufacture the motors in mass volume manufacturing equipment at very low cost.
The small size is the most apparent advantage of PiezoWave™, a motor that has been developed for very demanding applications in mobile phones, resulting in many other important properties such as robustness, motion dynamics (speed, precision etc.), power efficiency, weight etc.
The simple design of the PiezoWave™ and the fact that it is a complete motor also makes it very easy to integrate into other products.
150 mm/s at 0 load
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Nanomotion's HR Series motors are high precision ceramic motors which range in a size from a single element (providing 4N of force) to an eight piezo motor (providing 32N of force). The HR Series is capable of driving both linear stages and rotary stages. The HR Series piezo motors have a wide dynamic range of speed, from several microns per second to 250mm/sec and can easily mount to traditional low friction stages or other devices. The unique operating characteristics of the HR Series motors provide inherent braking and the ability to eliminate servo dither when in a static position.
HR Ultrasonic Motor Series Manuals
HR1 - piezo ultrasonic motor
HR4 - piezo ultrasonic motor
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Stepping Piezoelectric Actuators (SPA) are new long-stroke linear piezoelectric motors for micro/nano positioning applications benefiting of the APA heritage. They operate by accumulation of small steps.
Between each step the actuator is locked in position. When the long stroke is performed, it can be also operated in a deformation mode for a fine adjustment. In this case, the stroke is proportional to the applied voltage, which leads to a nanometer resolution and a high bandwidth. This actuator can be supplied with CEDRAT TECHNOLOGIES standard Linear Amplifiers.
In summary, SPAs offer:
A blocking at rest in any position (locking without power supply),
high stiffness,
A nano positioning resolution all along the stroke
Non magnetic behavior
Stepping Piezoelectric Actuators (SPA) find applications as micro/nano positioning, locking mechanism, valves actuators. They can be used in instrumentation, especially microscopes (AFM, STM), non-magnetic
equipment (MRI), space telescopes. Multi-axis OEM devices can be developed. SPA is a complement to the Amplified Piezoelectric Actuators (APAs) from CEDRAT TECHNOLOGIES.
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The Piezo LEGS® 20N linear motor is is ideally suited for move and hold applications or for automatic adjustments. is due to the fact that the motor does not require any power in hold position as well as that the motor has no back-lash and can move in increments of single nanometers.
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Simple electronics
For users wishing to fully integrate drivers into the overall system PiezoMotor can supply all waveforms and movement patterns to speed up the implementation. The motor is operating in a non-resonant mode and is not sensitive to cable lengths etc.
Open Loop/Closed Loop Operation
The motor can be moved in full steps, shorter steps or partial steps (micro-stepping) giving positioning resolution in the nanometer range. For extreme positioning requirements in the subnanometer range a bending mode is possible. Speed is easily adjustable from extremely low up to max specified.
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Simple electronics
For users wishing to fully integrate drivers into the overall system PiezoMotor can supply all waveforms and movement patterns to speed up the implementation. The motor is operating in a non-resonant mode and is not sensitive to cable lengths etc.
Open Loop/Closed Loop Operation
The motor can be moved in full steps, shorter steps or partial steps (micro-stepping) giving positioning resolution in the nanometer range. For extreme positioning requirements in the subnanometer range a bending mode is possible. Speed is easily adjustable from extremely low up to max specified.
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The Piezo LEGS® 10N linear motor is intended for a very large range of applications. The motoris ideally suited for move and hold applications or for automatic adjustments. This is due to the fact that the motor does not require any power in hold position as well as that the motor has no back-lash and can move in increments of singlnanometers. The Piezo LEGS® linear motor is available in a number of different verexample vacuum and non-magnetic environments (see separate data sheets). The maximum force of the motor is set by adjusting the number of springs giving the normal force. The motor is normally set for 6.5N (standard)
10N (optional) which is the maximum force. The motor is easily integrated and the drive rcan also be equipped with a metal drive raadapter (optional) to further facilitate the
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The utilized walking principle gives the new rotating motor unique properties, like low and variable speed - from 20 rpm down to one revolution a week - without gear box - and a maximum torque of 80 Nmm. The resolution is less than one µ-radian or close to one ten milionth of a turn. Totally back-lash free.
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Nanomotion's EDGE motor is the smallest industrial motor of its kind available in the marketplace today. Providing unlimited linear or rotary motion, the EDGE motor offers extensive opportunities in applications that suit a wide range of industries. The EDGE motor works with a uniquely designed, compact ASIC-based driver, and can be operated with any servo controller. The EDGE motor can be easily integrated into most bearing structures, and is ideal for mass production opportunities.
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This piezo-driven rotator is designed for rotating small samples or one or two ANPx50 translation stages with high resolution.
- Environments: LT; UHV; magnetic field
- Motion: rotary stepping and scanning
- Travel: 360° endless
- Resolution: µ°
- Size: Ø 20 mm; height 9.5 mm
- Load: 30g
- Typical minimum step size: 0.5 m° @ 300 K, 0.5 m° @ 4 K
- Scan range: 80 m° @ 300 K, 12 m° @ 4 K
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Piezo Stepping Linear Motors for Nanopositioning and PicoPositioning and High-Speed Ultrasonic Piezo Motors for Automation:
PI provides two types of piezo linear motors: PILine® ultrasonic motors, also referred to as resonant motors, and NEXLINE® PiezoWalk® motors. Both can, in principle, attain unlimited travel, yet they are very different in their design, specifications and performance.
PILine® resonant motors are characterized by a simple design and high speed to 800 mm/s.
NEXLINE® & NEXACT® stepping motors are more complex but can achieve much higher resolution, forces and dynamic performance (analog mode).
A great advantage of piezo motors is their intrinsic steady-state auto-locking capability. It does away with servo dither and the accompanying heat generation, an undesirable feature of electromagnetic linear motors. Step and continuous piezo motors are in principle nonmagnetic and vacuum-compatible, a requirement for many applications in the semiconductor industry.
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RC3 motors are high precision ceramic motors. Designed and manufactured by Nanomotion, Ltd., these motors combine unlimited stroke with high resolution, all in a compact package. RC3 motors provide a linear response to the input voltage. The operation of the motor and driver resembles that of a DC-motor driven by a voltage amplifier. The RC3-HV and RC3-UHV motors are constructed of materials that have been selected and designed for high vacuum compatibility.
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Nanomotion's EDGE motor is the smallest industrial motor of its kind available in the marketplace today. Providing unlimited linear or rotary motion, the EDGE motor offers extensive opportunities in applications that suit a wide range of industries. The EDGE motor works with a uniquely designed, compact ASIC-based driver, and can be operated with any servo controller. The EDGE motor can be easily integrated into most bearing structures, and is ideal for mass production opportunities.
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Piezo LEGS® - Demo kit
To get started and familiarize yourself with the Piezo LEGS® technology we offer several options of demo kits. This is the best way to test and verify the performance of the motors.
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- Smallest Linear Slide with High-Speed Linear Motor Drive
- 20 mm Travel Range
- Velocity to 500 mm/s
- Acceleration to 20 g
- Resolution to 50 nm
- Self-Locking
- XY-Combinations Available
- 20,000 h MTBF
- Vacuum Versions to 10-7 hPa
PILine® - Ultimate Motion in the Smallest Package:
PILine® M-661- and M-662-series piezo motor linear slides are the smallest high-speed piezo-motor-driven translation stages currently available on the market.
Working Principle:
M-661 and M-662 linear stages have a new, patented, ultrasonic drive developed by PI. The highly compact, integrated P-661 piezomotor drive can provide accelerations of up to 20 g and velocities of 500 mm/s and more, together with high resolution and holding force. Because the ceramic stator is pressed against a slider of the stage, piezomotors resist motion with an intrinsic holding force when the stage is at rest. The result is very high position stability without the heat dissipation common with conventional linear motors. Furthermore, there are no gears, leadscrews or other mechanical components to contribute play or backlash.
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