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Brooks® OEM products provide high-performing, cost effective solutions for OEM applications. Some of the OEM customers that we serve include medical device manufacturers, suppliers of gas blending equipment, vacuum pump makers and industrial processing equipment suppliers. In addition to the products shown here, Brooks can customize any standard product to meet OEM requirements.
* Compact thermal mass flow meters and controllers
* Needle valves for precise flow control
* Compact pressure regulators
* Flow controllers for variable upstream or downstream pressures
* Customized variable area, thermal mass, and Coriolis flow controllers and pressure products
* Private labeling available
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The GF03 Flare and Variable gas flow meter utilizes FCI's exclusive patented thermal resistance analyzer correction design that combines flow and gas composition sensors in a proprietary gas calibration technique. This innovative engineering breakthrough in thermal dispersion technology provides superior accuracy and repeatability in changing gas compositions.
The GF03 single insertion flow element design offers simplified installation and more reliability at a lower cost total cost than any other mixed gas application solution. FCI's unique design eliminates the need for additional temperature and pressure devices that increase the initial purchase price and maintenance costs typical of ultrasonic technology.
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The Brooks line of digital thermal mass flow instruments offers faster response, better accuracy and improved control over traditional analog devices. Features include: industry leading repeatability ensures a stable process even under changing conditions; self diagnostics and alarms eliminate downtime; multiple communication protocols allow easy integration into many control systems; elastomer seals option provides exceptional leak integrity and maximizes control valve shutoff dependability; ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes. Available with traditional analog or digital I/O. Globally approved for a variety of service areas.
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The ST98 Air and Gas Thermal Mass insertion type FlexMASSter® sets a new industry standard for thermal mass flow meter price-to-value performance by combining FCI's high level of accuracy and reliability with streamlined features to produce a high-value, no-frills product ideally suited for gas flow metering applications. The ST98's innovative flow element design with leading-edge flow transmitter electronics is complemented by factory calibration simulating the actual gas media and process conditions being performed in FCI's world-class Flow and Level Calibration facility. This quality engineering and manufacturing process assures our customers of receiving the #1 performing mass flow meter in the instrumentation industry.
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Calorimetr. Flow Monitor KAL-D
Calorimetric Flow Monitor KAL
Calorimetric Flowmeter /- monitors KAL-K
Calorimetric Flow Monitor f. Gases KAL-L
Calorimetric Flowmeter,-switch,-totalizer DVK
Differential Pressure Flowmeter RCD
Mass Flowmeter and /-controller for Gases MAS
Mass Flowmeter and /-regulator for Gases DMS
Mass Flowmeter for Gases MFC
Mass Flowmeter and /-regulator for Gases DMW
Therm. Mass Flowmeter for Gases KES
Mass Flowmeter and Counter PMS
Magnetic Inductive Flowmeter / -monitor PME
Magnetic Inductive Flowmeter/-monitor/-counter DMI
Magnetic Inductive Flowmeter/-monitor MID
Magnetic Inductive Flowmeter/-monitor PMG/PMH
Oscillation Flow Meters DOG
Ultrasonic Flowmeter DUB
Ultrasonic Flowmeter/-counter DUL
Vortex-Flowmeter,-switch DVZ
Vortex Flowmeter PWL
Universal Bussystem KOBUS
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Massflow under control
Massflow gas measurement is independant of temperature and pressure, thus controlling a process gas can be stable and reproduceable. Massflow controllers contain a PID-controller and can be driven through norm signal or field bus. Massflow meters are without actuators and are only for measuring massflow.
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The ST75 from Fluid Components International (FCI) is an accurate, no moving parts, direct mass flow measurement and monitoring solution for fuel gases, air, compressed air, inert and other gas flows within industrial processes. It is available in nine different sizes for direct, in-line installation in line sizes from 1/4 to 2 inch [6 to 51mm].
Combining precision lithography structured platinum RTD sensors embedded in FCI's equal mass thermowells with microprocessor electronics and precise actual gas calibration, the ST75 achieves outstanding flow measurement performance. ST75's direct mass flow measurement eliminates costs and space of additional sensors required by inferred technologies.
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KOFLOC 7100NL, 7100S
The KOFLOC Micro Gas Flow Meter MODEL 7100NL SERIES is a low-cost, low-power, quick response mass flowmeter with a chip-sensor based on the MEMS technology. The solid-state sensor assembly is very light & compact, and draws very little power, allowing the unit to run on a battery. it is thus ideal for incorporation into a portable gas analyzer and other type of equipment where size and low power-consumption are important criteria. Accepting power supply between 5 and 24 VDC with operating temperature between 0 to 50¡ÆC make the MODEL 7100NL easy choice in numerous applications.
FEATURES
- Miniaturized MEMS sensor assembly - Quick response of 70ms or less
- Low power consumption of just 20mW - Low power requirement of just 5VDC single power source
APPLICATIONS
- Flow monitoring - Flow control - Leak sensor
- Gas analyzer
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Gas Flow Regulators & Switches with needle valve with high/low alarm
Alongside numerous other possible uses, the red-y compact becomes an affordable alternative to the traditional variable area flowmeters.
In addition to its independence from the mains supply the compact series offer a clear and accurate indication of flow, insensitive to pressure and temperature changes, an integrated manual control valve and configurable switch functions.
- First mass flow meter with battery power
- At least two years of autonomy
- CMOS sensor technology
- On-the-spot direct reading, including bar graph
- Extremely compact unit
- Insensitive to pressure and temperature changes
- High accuracy and turndown ratio
- No moving parts
- Resistant to pressure bumps
- No restriction on installation position
- No inlet section required
- Optional 24 Vdc supply, manual valve & switch
- 3-year warranty
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MCF SERIES
Dedicated air/nitrogen mass flowmeter to save energy when using compressed air or nitrogen. Low cost, high performance, Compact and vibration resistant
CMG SERIES
The CMG series is a robust yet compact gas mass flow monitor for Gas/Air ratio control and Energy management on individual burners powered by various gas types including natural gas, propane and others.
CMS SERIES
High accuracy / high resolution gas mass flow meter suited for light industrial or laboratory applications, providing customer-selectable gas types and a multitude of output signals.
MCS100 is a ultra-compact, fast response gas mass flow sensor offering a bi-directional flow measurement. Is ideally suited for physics, medical and semi-conductor applications.
MCS200 :Gas Mass Flow Meters MCS200 is a compact, high accuracy and fast-response air/nitrogen mass flow sensor equipped with Yamatake's own µF(MicroFlow®) sensor chip with temperature or pressure compensation.
Can be installed in extra small mounting space using manifold mounting
It is ideal for flow measurement in numerous applications.
– Air samplers
– Gas analyzers
– Gas detectors
– Home oxygen concentrators
– Electronic/optical component pick and place detection
- Die bonder
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The Brooks Mf™ Series mass flow instrument line is designed specifically for use in harsh environments. These devices’ unique enclosure provides protection from dust and water making them ideal for indoor or outdoor use. Features include: NEMA 4X/IP65 ratings affords washdown protection eliminating the need for secondary enclosures; industry leading repeatability ensures a stable process even under changing conditions; self diagnostics and alarms eliminate downtime; analog and digital versions allow simple integration into any control system; flow rates up to 36,000 lpm (meter) available to meet high rate industrial process requirements. EX-Series products feature remote electronics and are certified for Zone 1 hazardous areas. Globally approved for a variety of service areas.
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KOFLOC 3810DS
The KOFLOC Mass Flow Meter MODEL 3810DS SERIES is a low-cost mass flowmeter with a digital display; based on the time-tested MODEL 3810 SERIES mass flow meter. Compact and lightweight, it requires no calibration and comes with 2-point alarm output. When used with the optional precision needle valve, it can serve as a low-cost alternative to more expensive mass flow controllers, especially in applications where attaining the optimum flow requires expert tweaking that cannot easily be simulated by rougher control offered by common mass flow controllers.
FEATURES
Rohs compliance Precision needle valve Easy maintenance
Digital flow indicator Single 24 VDC power source No caliberation require
SUS316L / Teflon® wetted parts
APPLICATIONS
Analyzer component Environment monitoring Leak testing
Biotechnological process Food processing Pharmaceutical process
Burn control Fuel cell R&D
Chemical process Gas applications Semiconductor process
Chamber pressure control Industrial furnace Solar power element
CCFL (Cold Cathode Fluorescent Lamp)
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Measuring range 1 m/s - 20 m/s air
Connection smooth shank (D = 15 mm); G1/2, Rp 1/2",
1/2 NPT, sliding flange DIN 43743
Material brass nickle plated
Max. pressure 8 bar
Max. temperature 120 °C
Switching accuracy +/-10% of meas. value.
Relays
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KOFLOC D3810
The KOFLOC Mass Flow Meter MODEL 3810DS SERIES is a low-cost mass flowmeter based on the time-tested MODEL 3810 SERIES mass flow meter, but with a new improved sensor and CPU, resulting in much improved overall performance in accuracy, repeatability and size reduction. The improvement also allows much wider measurement range from as little as 100 cc to 50 L/MIN. Despite its low-cost, the MODEL 3810DS SERIES uses bypass capillary mechanism so it does not sacrifice accuracy.
FEATURES
- Rohs compliance - Compact & Low-Cost - Free mounting position
- Easy maintenance
APPLICATIONS
- Air sampling - Analyzer component - Bioreactor
- Biotechnological process - Burn control - CCFL manufacturing
- Chamber pressure control - Chemical process - Environment monitoring
- Electronic device manufacturing - Food production - Fuel cell testing
- Fermentation process - Gas blending - Gas distribution
- Gas flow monitoring - Gas generation - Industrial furnace
- Leak testing - Pharmaceutical process - Pollution monitoring
- Process flow control - R&D - Solar power element manufacturing
- Secondary calibration reference - Semiconductor process - Sputter deposition
- Surface treatment process - Thermal flame spray - Thin film manufacturing
- Vacuum apparatus - Vapor deposition
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We help you to develop a superior product based on our leading CMOSens® Technology. Together with our customers we have implemented modules and complete devices for the following markets and applications.
In cooperation with our customers we for example developed:
- Digital mass flow controllers
- Battery powered flow meters
- Gas meters
- Flow meters with 200 slm range for medical applications
- Flow meters up to 30'000 slm
- System design with combined flow and pressure control (gaschromatography)
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Porter 100 Series Mass Flowmeters (MFM’s) accurately measure flow rates of a wide variety of gases from 5 sccm to 1000 SLPM full scale nitrogen flow for operating pressures up to 3000 PSIG. The MFM’s provide a linear flow signal output proportional to a calibrated flow rate.
Porter Digital Series 500 MFM's handle flow rates and operating pressures identical to those of the 100 Series MFM's. The Digital Series 500 MFM's feature better accuracy & repeatability than analog MFM's, performance-enhancing digital electronics, multi-gas capability & self-diagnostics.
Porter 3200 Series MFM's are CSA-certified for Class 1, Division 2, Groups A, B, C and D hazardous locations and provide accuracy, repeatability and response necessary for demanding process applications. Model 3271 is designed to be an integral component in surface-mount fluid distribution systems utilized in process analyzer and sample handling applications. Specifically configured to ANSI/ISA-76.00.02 specifications for surface-mount components, Model 3271 can be installed on two (2) spaces of an SP-76 compliant manifold without the use of process connections. Model 3211 MFM includes compression fitting or metal gasket face seal process connections for inline installation.
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- Accuracy: ±2% of full scale including linearity
- Repeatability: ±0.15% full scale or better
- Turndown Ratio: 50:1
- Response Time: 1 second
- Gas Ambient Temperature: 0 to 60°C
- Temperature Coefficient: 0.05% full scale per 1°C or better
- Pressure Coefficient: 0.01% full scale per PSI or better
- Maximum Gas Pressure: 500psi-SS316
- Leak integrity: 1 x10-6 cc/min of He or better
- Wetted Parts: 316 SS, Viton® O-rings
- Connections: 1/4" NPT(F), standard
- Input/Output Connection: 9-pin sub-D connector
- Output signal: Linear 0-5 Vdc,1000 ohms min load,
- Input Power: Meters: 24 Vdc, 15VDC, 12VDC
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The Model 4046 primary calibrator has a range of 2.5 to 300 liters per minute (lpm). This small, portable, battery-operated unit is lightweight and easy to use. Volumetric flowrate is displayed continuously so adjustments to pump flow can be made in real-time. This primary calibrator is accurate to 2% of reading.
Features and Benefits:
- Provides continuous real-time volumetric flow rate readings, so pump adjustment and calibration is fast and easy
- Battery powered, compact and lightweight
-Field portable—use the same primary calibrator for adjustment, calibration and periodic checks
- Comes with a NIST traceable calibration certificate
- Kits come complete and are ready to use
Applications:
- Environmental sampling
- Indoor air quality
- Industrial hygiene sampling
- Epidemiology health studies
- Field services
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Alicat Scientific TM M Series Laminar Mass Flow products represent the pinnacle of mass flow measurement instrumentation. Equipped with onboard display, user selectable 30 gas standard calibration, and a rugged stainless steel casing. Alicat mass flow meters are setting a higher standard for affordable mass flow instrumenation. The Alicat M series mass flow meter is also available in a NeSSI compatible configuration.
Mass Flow Meter and Volumetric Flow Meter Applications
• Leak Testing
• Membrane filter testing
• Quality control checks on laboratory equipment (e.g. gas chromatographs)
• Quality control testing
• Leak testing
• Laboratory
• Semiconductor
• Pharmaceutical
• Biotechnology
• Fuel Cells
• Automotive
• Aerospace
Benefits of Alicat Mass Flow Meters
• Value
• Reliability
• 30 gas selectable calibration
• On board display
• 0-5V Analog Output with optional secondary output
• Optional totalizer function
• Available in flow ranges from 0.5sccm through 1500SLPM
• NIST traceable
• CE marking
• Stainless steel body and casing
• Optional Flow Vision software
Now with an industry first, lifetime warranty!
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- Accuracy: ±1% of full scale including linearity
- Repeatability: ±0.15% full scale or better
- Turndown Ratio: 100:1
- Response Time: 1 second
- Gas Ambient Temperature: 0 to 60°C
- Temperature Coefficient: 0.05% full scale per 1°C or better
- Pressure Coefficient: 0.01% full scale per PSI or better
- Minimum Pressure Requirements: Meters: 1 inch of H2O
- Maximum Gas Pressure: 500psi-SS316
- Leak integrity: 1 x10-6 cc/min of He or better
- Wetted Parts: 316 SS, Viton® O-rings
- Connections: 1/4" NPT(F), standard
- Input/Output Connection: 9-pin sub-D connector
- Output signal: Linear 0-5 Vdc,1000 ohms min load, 4-20 mA, 500 ohms loop resistance
- Input Power: Meters: 24 Vdc @ 300 mA, 115 Vac, 220 Vac with ac adaptor
- Weight: 1.25 kg (2.75 lb) with power supply
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The TGM mass meter for pure gases was especially developed for gas supply systems, compressed air supply, ovens and laboratory applications. Thanks to the direct measurement of the mass flow a volume correction via pressure and temperature is not required.
The TGM is easy to use and can be installed in any position. Further advantages can be found in rapid response times, low power consumption (< 2.5 W) and pressure drop.
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* 4 diameter types:
o DN 15: 0,25 to 75 Nm3/h
o DN 25: 0,75 to 225 Nm3/h
o DN 40: 1,3 to 410 Nm3/h
o DN 50: 2,3 to 700 Nm3/h
* Parameters: standard volumetric flow rate in Nm³/h or Nl/min; consumption quantity in Nm³; media temperature in °C
* Output signals: The following 2 outputs are enabled for selection at the same time:
o Analog output, 4 to 20 mA (4-wire)
o Pulse output
o 2 switch signals, programmable (dependent on consumption or volumetric flow rate, time-based or non time-based, NC or NO contact, hysteresis, window)
* Extremely easy to operate using just 2 control buttons
* Design with inflow stretch
o Advantage: reliable accuracy, including in installed state!
o Reason: The sensor is calibrated to the pipe section (Nm³/h not m/s) -> optimum flow profile, hence no loss of accuracy through specification of incorrect pipe diameter, incorrect positioning (depth/torsion)!
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Two technologies - thermal mass and multivariable vortex mass - provide the best solutions for most mass flow measurement applications. Thermal mass flow meters are ideal for monitoring low pressure gas flows. The multivariable vortex mass meter measures a wide range of gas, steam and liquid flows.
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The ASF1400 & ASF1430 gas flow sensors set a new standard for air flow, mass flow or gas flow sensors.
Intelligent CMOSens® Technology allows an integrated, digital and reliable mass flow sensor at very attractive cost.
Features
- Unique dynamic flow range from 0.03 to 400 sccm
- Accuracy 0.05 % full scale or 1 % measured value (greater value applies)
- Lowest detectable mass flow rate down to 0.03 sccm
- Fully calibrated and temperature compensated
- Linear digital output signal (RS-232 or SPI standard)
- Fast response time (ASF1400: 150ms / ASF1430: 5ms)
- Rugged chemically innert PBT housing
- CE-certified / FCC (CFR 47)
- Leading CMOSens® Technology for superior performance
- Unbeatable price-performance ratio
- Easy-to-use due to calibration & standard digital interface
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MASS FLOWMETERS FOR LABORATORY AND GENERAL PURPOSE APPLICATIONS
The TSI Model 4040 Mass Flowmeter can be used for a multitude of gas flow measurement applications. Whether measuring gas flows in a laboratory or manufacturing setting, TSI general-purpose mass flowmeters provide accurate results with multiple data output options. The display versions come complete with accessories making setup and operation fast and convenient.
The TSI mass flowmeters are specified as 2% of flow rate reading. One TSI mass flow meter covers the same range as three or more "percent of full scale devices" ... with better accuracy at most points! Fast 4 millisecond response ensures accuracy in fluctuating flows. This fast response time of the TSI mass flowmeter is ideal for closed-loop control systems and integrated volume measurements. Low pressure drop of the TSI mass flowmeter minimizes flow circuit back pressure and its impact on the system.
Features and benefits:
- Fast and accurate
- Low pressure drop
Applications:
- Medical
- Industrial
- Laboratory
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Our Mass flow meters for gas use Laminar Flow Element technology. This is a subset of differential pressure flow meters.
User selecs gas
Rapid response
NIST traceable
All common non-aggressive gases such is air, nitrogen, argon, helium, hydrogen, natural gas and carbon dioxide.
Digital indication with either a voltage or a current transmitter
Type 4 construction (weather proof)
Built-in alarm switches
Able to install in any orientation
Intrinsic safety optional
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Measuring range 0-10 Ncm³/min.... 0-500 Nl/min. N2
Connection 1/4 NPT, Swagelok 1/8" - 1/2"
Material nylon; st. st.
Max. pressure 10 bar (nylon), 35 bar (st. st.)
Max. temperature 50°C
Accuracy ± (1) 1,5 % FS
Analogue output, option digital display
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A comprehensive range of thermal mass gas meters for flows as low as 0-10 SCCM and up to emissions stack-flows are available. These measure mass directly not requiring the measurement and computation of pressure and temperature. The meters have a wide measurement range.
Our experienced engineering staff are pleased to offer meter selections to meet specific application requirements. Meters are engineered to meet particular process needs both in materials and design. A range of high-pressure flowmeters which illustrates our engineering skills and flexibility can be seen in our Oil Industry Flowmeters section.
We take pride in our manufacturing expertise and high quality control standards. Litre Meter has established a reputation in over three decades of operation for fast response and excellent delivery.
Suitable for high accuracy mass measurement for any clean gas. Spacial units avialable for ultra high purity applications and the S100 dial-a-gas unit allows 10 gas calibrations for multiple gas measurement.
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Porter Liquid Mass Flow Controllers (LMFC's) are designed to address the need for fast, precise control of low liquid flow rates. Exclusive control circuitry, combined with the integral proportional piezoelectric-actuated control valve, provide fast, stable control at low flows. Clean room assembly and all metal seal construction ensure high purity and leak integrity. A unique laminar bypass and sensor assembly provide accurate measurement with only a 5°C rise in fluid temperature. The compact package size of the LMFC's simplifies system integration. Liquid Mass Flowmeters are available for applications requiring flow monitoring only.
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