Gigalam Panel
Gigalam panel filters are combination products specially developed for mini-environment and process tool applications. An ULPA filter using standard glass media, low boron media or PTFE is combined with single or multiple layers of Gigapleat media.
Sizes are custom made to suit specific pieces of process equipment. The compact form of Camfil Farr Gigalam filters means that often they may be installed in the same space as the original particle filter.
The Camfil Farr Gigalam features:
- Extremely small form factor - often the same as for particle filtration only.
- Choice of standard, low boron or PTFE particle media.
- Choice of different Gigapleat media.
- Low pressure drop.
- High media cleanliness.
SEMATECH recommends the use of e-PTFE or low boron ULPA filters in mini-environment equipment. Camfil Farr's Gigalam can be manufactured with an overall height less than 4". Customized solutions are also available.
Description
Systemair TSO square perforated ceiling diffuser, with PER plenum box as an accessory. The TSO can be shielded with the SSO accessory.
Accessories
Ceiling plate (600x600) TPP
Shielding SSO
Plenum box PER with removable damper and test points
Function
The TSO is a supply and exhaust air diffuser designed for ceiling assembly. The TSO has a perforated front plate and a connection sleeve fitted with a rubber seal tested for airtightness. The TSO has high induction which allows a maximum air temperature difference of dT 10 K. The distribution pattern can be altered with the SSO shielding accessory to one-, two- or three-way distribution. The distribution unit is adjustable.
