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... automotive fields, with optimization of the inspection sequence enabling a defect inspection speed of over forty 200-mm wafer sheets per hour. • Defect detection by Hitachi’s original ...
... semiconductor fabs. Higher throughput and detection sensitivity for high-volume production • As dark-field wafer-defect inspection systems, DI4600 contributes to manage semiconductor ...
Super Resolution Broadband Plasma Patterned Wafer Defect Inspection Systems The 392x Series broadband plasma defect inspection systems support wafer-level ...
KLA - TENCOR
This system can automatically inspect and sort the wafers to be used for production. It has several intelligent functions, such as deep learning, machine vision, fault alert and factory MES ...
... Imperia system detects and classifies yield-killing defects with the additional benefit of simultaneous state-of-the-art photoluminescence (PL) production monitoring. Product Overview With unique optical design technology, ...
Onto Innovation Inc.
The GWI System was build to detect defects in glass wafers early in the production cycle. The system is based on a high resolution smart camera to meet the required accuracy ...
... difference, crack, scratch, metal residue and metal loss High precision resolution System resolution: 0.2-0.8 μ m Fast detection speed Patterned wafer: 15 minutes / wafer when ...
The FRT MicroProf DI optical inspection tool, enables inspection of structured and unstructured wafers during the entire manufacturing process. By combining 2D inspection ...
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