|
|
|
|
|
|
Theta Probe - High Performance ARXPS Spectrometer
Thermo's Theta Probe combines advanced monochromator and lens and detector technology to provide rapid, precise analysis. With the revolutionary ARXPS capability to provide angular data simultaneously without tilting the sample
Product Detail
High-performance XPS, Small Area XPS (SAXPS) and Unique Angle Resolved XPS (ARXPS) capabilitySmall Area XPS with the Microfocus Monochromator for maximum sensitivity Sample Alignment is fast and accurate using the advanced optical system Elemental and chemical state mapping of surface features 70mm x 70mm sample stage for high throughput and sample thicknesses up to 25mm Automation for unattended operation Avantage Windows NT based data system
The Theta Probe instrument combine advanced monochromator, lens and detector technology with the Avantage data system (Windows NT) to provide rapid, precise analysis.
Developed from the highly successful Sigma Probe, Theta Probe's revolutionary ARXPS capability provides angular data simultaneously collected without tilting the sample.
|
|
|
|
|
|
Overview
The Quantera, PHI's second generation Scanning X-ray Microprobe provides the sensitivity and tools needed to apply XPS surface analysis to a broader range of current and future product development and failure analysis needs. High performance micro-area spectroscopy, XPS depth profiling, automated insulator analysis, and robotic sample handling define a new generation of XPS surface analysis equipment for today's laboratory.
Important features of the Quantera SXM include:
- Patented scanning x-ray microprobe design with <9um diameter minimum x-ray beam size
- Complete XPS capabilities (spectroscopy, depth profiling, mapping, etc.) at all x-ray beam sizes
- Highest performance XPS instrument for thin film depth profiling
- Optional C60 sputter ion gun for organic / polymer depth profiling
- Automated effortless analysis of electrically insulating samples
- Accurate quantitative analysis
- Robotic sample handling
- A completely automated, easy to use instrument platform
Micro area spectroscopy and high performance thin film analysis capabilities open new areas of application for XPS surface analysis in all environments. The complete automation of the system makes it easy to use and increases the reproducibility of routine measurements. Large sample platens make it possible to analyze “real world” large samples or multiple small samples automatically. A new generation of XPS surface analysis instruments are available today from PHI.
|
|
|
The JPS-9200 is a newly developed X-ray Photoelectron Spectrometer system used for micro-area surface analysis of a broad range of samples. The new hemispherical electron analyzer incorporates a combination of an electrostatic accelerating lens and magnetic field lens to improve sensitivity 20 times that of previous models. Both monochromatic and non-monochromatic x-ray sources are provided as standard. The minimum x-ray spot size is 30 microns. The ability to map very large areas (50mm x 18mm) is achieved with stage mapping. Using the Total Reflected XPS (TRXPS) mode backgrounds are significantly reduced thus improving the minimum detectability limit. The sample stage provides full automation for smooth and precise positioning.
|
|
|
|
|
|
The NanoESCA offers up to 10 times better XPS image resolution, faster acquisition times, small spot spectroscopy with excellent energy resolution, and overview images with 100 times better resolution than presently commercially available instrumentation. For its revolutionary design the NanoESCA received the 2007 R&D 100 award (www.rdmag.com).
Significant technical development often requires thinking out of the box. Lateral resolution of conventional technologies for imaging XPS, be it scanning an x-ray beam or using magnetic lenses, has been stuck for many years at sub 10 µm. It was all too apparent that tweaking these technologies would not be sufficient to reach the resolution required for nanotechnology. This barrier is breached by the new, patent-protected (EP 1559126 US 7,250,599) NanoESCA. The design includes a non-magnetic, electrostatic PEEM lens and a double-pass hemispherical analyser. Rapid PEEM survey imaging (< 50 nm resolution) can be used to locate features, whilst its lateral resolution in imaging ESCA of 650 nm in the laboratory and 150 nm at the Synchrotron are simply unique.
|
|
|
|
