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linear positioning system / XYZ / XY / XZ
linear positioning system
P-611.1 series

... Travel range 120 µm - Resolution to 0.2 nm - Cost-effective mechanics / electronics system configurations - Outstanding lifetime due to PICMA® piezo actuators - Z stage, XY, XZ and XYZ versions available

XY positioning system / linear
XY positioning system
A-322

PIglide® reference-class XY positioning system The PIglide® HS planar scanner has magnetic linear motors, vacuum preload and absolute encoders: Contact- and friction-free motion for the ...

XY positioning system / rotary / linear / for fiber optics
XY positioning system
AGS5000 series

... laser firing CNC multi-axis control 2 to 32-axis contouring Multi-dimensional error correction Special sealed connectors to keep metal particles out Air purged Passive air isolation ALS5000XY/ATS2000LT/ASRT-245 ...

multi-axis positioning system / XY / 2-axis / linear
multi-axis positioning system
ASR-E Series

The ASR-E Series Closed-Loop Motorized XY Scanning Stages are available from 50 mm up to 305 mm travel per axis. Stages have easily adjustable non-contact hall sensor limit switches, ...

multi-axis positioning system / 6-axis / 3-axis / 1/2-axis
multi-axis positioning system
ZMI™ Series

... can be assembled in a wide variety of configurations. The example systems below show some typical configurations used by ZMI!" customers. 2-Axis System 2-Axis System (Vacuum) 3-Axis ...

XY positioning system / rotary / laser / vacuum
XY positioning system
Wafer Ion-implanting

... zone station- 7 cool statoins 1100oC in vacuum atmosphere High precision DC power supply Servo controlled motion Large rear access port Large loading door Evacuation and inert gas system