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in-line positioning system / XY / XYZ / XZ
in-line positioning system
P-611.1 series

... Travel range 120 µm - Resolution to 0.2 nm - Cost-effective mechanics / electronics system configurations - Outstanding lifetime due to PICMA® piezo actuators - Z stage, XY, XZ and XYZ versions available

XY positioning system / in-line
XY positioning system
A-322

PIglide® reference-class XY positioning system The PIglide® HS planar scanner has magnetic linear motors, vacuum preload and absolute encoders: Contact- and friction-free motion for the ...

XY positioning system / rotary / in-line / fiber optic
XY positioning system
AGS5000 series

... Position synchronized laser firing CNC multi-axis control 2 to 32-axis contouring Multi-dimensional error correction Special sealed connectors to keep metal particles out Air ...

multi-axis positioning system / XY / 2-axis / in-line
multi-axis positioning system
100x120 mm, 50x50 mm, 42 mm height | ASR-E Series

The ASR-E Series Closed-Loop Motorized XY Scanning Stages feature travel lengths of 100x120 mm, with /- 6 µm full travel accuracy and 2 µm repeatability. They have a low profile of only 42 mm, and are ...

multi-axis positioning system / 6-axis / 3-axis / 1/2-axis
multi-axis positioning system
ZMI™ Series

... can be assembled in a wide variety of configurations. The example systems below show some typical configurations used by ZMI!" customers. 2-Axis System 2-Axis System (Vacuum) 3-Axis ...

XY positioning system / rotary / laser / vacuum
XY positioning system
Wafer Ion-implanting

... zone station- 7 cool statoins 1100oC in vacuum atmosphere High precision DC power supply Servo controlled motion Large rear access port Large loading door Evacuation and inert gas system