3M Electronics
Group: 3M

Diamond soft polishing pad
ø 4" - 10" 3M Electronics

3M™ Diamond Pad Conditioners for CMP
Highly engineered structured abrasive products deliver reliable performance for critical semiconductor CMP applications. 3M™ Diamond Pad Conditioners use deliberate diamond placement and protusion to produce a consistent finish, with superior diamond retention to reduce scratching.

Key features and benefits:
* Lower cost of ownership
* Optimized for extended pad and disk life
* Flat area of active diamonds for low non-uniformity
* Exclusive polymer substrate enhances corrosion resistance
* Diamonds secured with both chemical and mechanical bonds for superior retention
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