X-Theta Air Bearing Stage Ultra-Smooth Motorized Rotary & Linear Motion -- Ideal for Wafer Scanning! ABTech inc's X-Theta stage combines ultra-precision rotary and linear air bearings with DC brushless motors and high resolution non-contact encoders to produce the ultimate smooth moving stage. Ideally suited for wafer scanning machine applications. These stages are designed for cleanroom environments, incorporating appropriate materials, parts cleaning and captured exhaust. This feature allows the air bearing exhaust to be drawn to a common port, where a vacuum supply can be connected to take the exhaust flow away from the work area. This is critical in some applications where particle flow around work surfaces may cause contamination. Features: - X-axis: magnetically preloaded linear air bearing (MLAB7750) - Theta axis: fully constrained rotary air bearing (AT150/200-DD) - Contained exhaust feature - Cleanroom compatible - Ultra-smooth motion, no static friction - Linear & rotary DC brushless motors - High resolution encoders - Total non-contact component design - "no parts to wear" - Intermediate vacuum chuck worktable with internal porting - Low air consumption - Custom tooling and fixturing design and manufacturing - Turn-key systems available for O.E.M.s - Brush ring available for electrical grounding of rotating components