Linear motor driven XY stage
ABTech Inc
ABTech inc offers a precision cross roller slide design ideal for single axis or stacked stage applications.
ABTech's attention to detail through out manufacturing and assembly result in a superior performing mechanical bearing stage.
High precision cross roller linear guide rails are incorporated into the slides providing high accuracy travel straightness, smoothness of motion and high stiffness.
The CRS-1012 X-Y stages are available in anodized, hard anodized or electroless nickel plated aluminum. The nickel plated version features fully vented holes and vacuum compatible hardware and lubricants ideal for demanding vacuum environment applications such as in semi-conductor mask repair or etching.
ABTech's modular design approach and full engineering services can respond quickly to provide a solution to your O.E.M. needs for ultra-precision linear motion.
Features:
- High-precision cross roller linear guide bearings
- High load capacity and stiffness
- 10.00" x 12.00" worktable
- Precision lead screw drive
- Precision duplex bearing support
- Position repeatability: 50µ" (1.25µm)
- X-Y orthogonality: 15 arc-sec
- Vacuum rated versions available
- Motor drives, encoders, drive amplifiers and controls
- Modular design - custom systems can be provided for O.E.M.
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