Imaging ellipsometer
365 - 1000 nm, 38 – 90° | nanofilm_ep3se
Accurion GmbH
The EP³-SE is the only commercially available Imaging Spectroscopic Ellipsometer and offers greater flexibility for measurements with Imaging Ellipsometry.
The EP³-SE allows:
* analysis with highest accuracy and precision
* analysis of multilayer/multi parameter systems
* to choose a proper wavelength for absorbing materials
* optimized sensitivity by wavelength tuning
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