Ball bearing hybrid turbomolecular vacuum pump Adixen Alcatel Vacuum Technology
ATH Serie

The Adixen ATH series offers a complete range of hybrid turbomolecular pumps from 200 to 300l/s.
- ATH 200
- ATH 300

The pump design principle of turbomolecular stages exhausting to Holweck stages provides high pumping capacity, low inlet pressure and high exhaust pressure.

These pumps provide a clean, dry vacuum (hydrocarbon and particulate free) when backed by a membrane (AMD) or multi-roots (ACP) pump.

Key Benefits:
- Robust against:
- Shock
- Movement
- Air inrush
- Pump may be mounted in any orientation:
- only one part number to order, stock and maintain
- Pump a volume or back another pump
- Connect a less expensive vacuum gauge to monitor the inlet pressure
- Connect a venting valve to provide a more compact solution

Features
- Low rotational speed
- Grease lubricated bearings
- Intermediate vacuum ports

Typical Applications are:
Mass spectrometry, leak detectors, electron microscopes, R&D, general low inlet pressure requirements, deposition.

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