4 PUMPS designed for semiconductor processes
Description Applications
Adixen maglev hybrid turbomolecular pumps
5 corrosion proof features
- Automatic balancing system
- Built-in 75°C heating system
- 5 active axes
- Inert gas purge
- Inverted dynamic seal (only for ATH400 and ATH 1300)
High throughput applications
ATH 400 M, ATH 1300 M,ATH 1600 M and ATH 2300 M are designed for high pressure, high throughput pumping needed for semiconductor and other thin film coating applications.
A compact and modern design
- Adjustable rotational speed for optimizing pumping parameters
- Very high MTBF
- Low cost of ownership
- Low noise and vibration levels
- Battery free
