Ball screw driven XY stage
max. 400 mm, max. 200 mm/s, ± 1.0 µm | ATS3600 Series Aerotech

The demand for a high accuracy, robust, open-frame stage is met with the ATS3600. This dual-axis, large aperture, open-frame stage addresses the unique needs of scanning microscopy, wafer and printed circuit board inspection, and automated assembly.

Design and Construction
Unlike other designs that are assembled from several discrete pieces, the ATS3600 is a three-piece design. This allows critical components such as orthogonality, straightness, and flatness to be controlled during the initial machining, resulting in a stage with exceptional geometrical tolerances and inherent orthogonality.

The ATS3600 utilizes high-precision linear motion guide (LMG) bearings, with a total of four trucks per axis. These make the ATS3600 ideal for fast, repetitive operations. The LMG bearings also exhibit exceptional stiffness, high load capacity, and extremely low friction.

The high stiffness inherent in this stage allows it to be side-driven, yet still retain excellent performance characteristics. The ATS3600 represents a major upgrade in performance over typical side-drive stages.

Motors and Drives
The ATS3600 includes two high-performance NEMA 23 BMS series brushless, slotless motors. This motor has all of the advantages of a brushless motor - high acceleration, no brushes to wear, and lower heating - yet has zero cogging for the ultimate in smooth motion.