Linear motor driven single-axis positioning stage
max. 200 mm, ± 0.3 µm, max. 12 kg | ALS135 Series Aerotech

The ALS135, with its low profile and outstanding performance characteristics, is the ultimate solution for high-accuracy alignment and inspection stations.

Linear Motor Drive
Unlike many stages that utilize a side-drive lead screw, the ALS135 employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device, there is no backlash, windup, or "stiction" that is normally associated with a lead screw or ball screw drive.

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS135 to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-accuracy device with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven stages.

Outstanding Resolution
For alignment applications, outstanding step-to-step resolution is critical. The ALS135 meets this demand with a resolution of 10 nm when coupled with Aerotech controls. The direct-drive linear motor allows the ALS135 to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical.