Nano-positioning stage
max. 160 mm | ANT130-L Series Aerotech

The ANT130-L series stages offer best-in-class performance in speed, accuracy, resolution, repeatability, reliability, travel range, and are offered in two accuracy grades. With its low profile and outstanding performance characteristics, the ANT130-L is the ultimate solution for high-accuracy alignment, inspection, positioning, and measurement stations.

Noncontact Direct-Drive
Unlike many stages that utilize a lead- or ball-screw drive, the ANT130-L employs a center-driven, non-cogging, noncontact linear motor and encoder as the driving element. Since the linear motor is a direct-drive device, there is no backlash, windup, or "stiction" that is normally associated with a lead- or ball-screw drive.

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ANT130-L to a peak unloaded acceleration of 1 g and a maximum velocity of 350 mm/s. The result is a high-accuracy device with outstanding throughput that significantly outperforms comparable high accuracy screw-driven or other stages in its class.

Outstanding Resolution
For alignment applications, outstanding step-to-step resolution is critical. The ANT130-L meets this demand with an incremental step size of 1 nm when coupled with Aerotech drives and controls. The direct-drive linear motor allows the ANT130-L to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical.