Linear nanopositioning stage ANT95R Series

rotarymotorized1-axis

ANT95R direct-drive rotary stages offer unprecedented in-position stability and sub 0.01 arc-sec incremental motion performance and are offered in two grades of accuracy. The compact size allows for easy integration with other motion axes and systems. •0.01 arc sec resolution •0.005 arc sec in-position stability •Outstanding error motion specifications •Multi-axis configurations •High dynamic performance •Both limited and unlimited rotation Multi-Axis Capabilities The ANT95R series is designed for compatibility and easy integration with Aerotech's ANT linear stage product offerings. Together these stages provide accuracy, stability and small size performance capability for almost any nanomanufacturing or inspection application.