Vertical translation air bearing stage
50 - 200 mm, max. 300 mm/s, max. 15 kg | ABL1500Z series Aerotech

The ABL1500Z is a vertical translation version of the ABL1500 series air-bearing stage. The ABL1500Z is ideally suited for applications with large offset loads and where extreme accuracy is required.

Leading-edge manufacturing, particularly in the semiconductor and data storage industries, demands positioning tolerances beyond the capability of conventional ball-screw and mechanical-bearing positioning systems. The ABL1500Z, with its fully active preload, exceptionally high stiffness, and excellent geometric characteristics, was designed specifically to meet those demands.

Air-Bearing Design for High Dynamic Performance
The ABL1500Z incorporates an air-on-air preload on both the vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.

Aerotech's proprietary manufacturing techniques result in a stage with unsurpassed geometrical characteristics, which maximize performance by yielding superior pitch, roll, yaw, straightness, and flatness specifications.