Micro Electro Mechanical Systems (MEMS) are micromachines the size of a grain of salt or the eye of a needle that integrate mechanical elements, sensors, actuators and electronics on a silicon substrate. ALGOR's MEMS solution links electrostatic analysis to stress analysis tools. Additionally, components that house, protect and interface with a MEMS device can be designed and optimized. These analysis capabilities are all available within ALGOR's easy-to-use, single user interface for finite element modeling, results evaluation and presentation, FEMPRO.