The Alicat line of Laminar Mass Flow Controller products utilize a proportional valve coupled to a mass flow meter body. These robust, closed-loop devices can accept and transmit 0-5Vdc, 0-10Vdc, 4-20mA or RS232 control signals. Flow controllers range from 0.5 CCM full scale to 1,500 SLPM full scale and all flow control devices include a dynamic digital display that simultaneously shows all the process parameters being measured by the meter plus a push button operator interface for set point adjustments, gas select and tare.
Common Applications for Alicat Mass Flow Controllers
Micro-Electro Mechanical(MEMs)
Nanotechnology
Fuel Cell
Pharmaceutical Processing
Biotechnology
Phyiscal Vapor Deposition
Chemcial Mechanical Polishing
Carburizing
Process Control
Paint Applications
Environmental/Atmospheric Testing
Emissions Bench
Benefits of Alicat Mass Flow Controllers
Fast Response Time 10ms
Low Power Consumption
Repeatable
Reliable
On Board Display
Low Gas Consumption
Accuracy +/- 1% of full scale
