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thermal mass flow controller
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Thermal mass flow controller


The Alicat line of Laminar Mass Flow Controller products utilize a proportional valve coupled to a mass flow meter body. These robust, closed-loop devices can accept and transmit 0-5Vdc, 0-10Vdc, 4-20mA or RS232 control signals. Flow controllers range from 0.5 CCM full scale to 1,500 SLPM full scale and all flow control devices include a dynamic digital display that simultaneously shows all the process parameters being measured by the meter plus a push button operator interface for set point adjustments, gas select and tare.

Common Applications for Alicat Mass Flow Controllers
• Micro-Electro Mechanical(MEMs)
• Nanotechnology
• Fuel Cell
• Pharmaceutical Processing
• Biotechnology
• Phyiscal Vapor Deposition
• Chemcial Mechanical Polishing
• Carburizing
• Process Control
• Paint Applications
• Environmental/Atmospheric Testing
• Emissions Bench

Benefits of Alicat Mass Flow Controllers
• Fast Response Time 10ms
• Low Power Consumption
• Repeatable
• Reliable
• On Board Display
• Low Gas Consumption
• Accuracy +/- 1% of full scale


Now with an industry first, lifetime warranty!


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