Thermal mass flow controller
MFCs series Alicat Scientific

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The Alicat line of Laminar Mass Flow Controller products utilize a proportional valve coupled to a mass flow meter body. Flow controllers range from 0.5 SCCM full scale to 2000+ SLPM full scale and all ranges includes 30 selectable gas calibrations, a dynamic digital display that simultaneously shows all measured process parameters and a push button interface for set point adjustment and gas select. Available with a variety of connection options (NPT, VCR, VCO, etc.) and digital and analog communication options. (0-5Vdc, 0-10Vdc, 1-5Vdc, 4-20mA, RS-232, RS-485, ProfiBus, Devicenet, etc.)

Common Applications for Alicat Mass Flow Controllers
• Micro-Electro Mechanical(MEMs)
• Nanotechnology
• Fuel Cell
• Pharmaceutical Processing
• Biotechnology
• Phyiscal Vapor Deposition
• Chemcial Mechanical Polishing
• Carburizing
• Process Control
• Paint Applications
• Environmental/Atmospheric Testing
• Emissions Bench

Benefits of Alicat Mass Flow Controllers
• Value
• Reliability
• 30 gas selectable calibration
• On board display
• Analog Output with optional secondary output
• Digital Output
• Optional totalizer function
• Available in flow ranges from 0.5sccm through 2000+SLPM
• NIST traceable
• CE marking
• Stainless steel body and casing
• Optional Flow Vision software
• Fast Response Time 10ms
• Low Power Consumption
• Repeatable
• Reliable
• Low Gas Consumption
• Accuracy +/- (0.8% Reading + 0.2% FS)
• Optional high accuracy calibration of +/- (0.4% Reading + 0.2%FS)
• NESSI base available

Now with an industry first, lifetime warranty!