6-axis parallel-kinematic hexapod micro-positioning system
max. 200 mm/s | AI-HEX-HR2 Alio

Parallel Kinematic Robotics, ALIO Industries (US patents 6,769,194 and 6,671,975) parallel kinematic 3 axis and 6 axis robotic systems promise to revolutionize the manufacturing processes and inspection of products requiring nanometer resolution and repeatability.

With 5 nanometer resolution revolving around a virtual point in space coupled with speeds of up to 250 mm/sec these robotic products form the basis of the next generation of automated nano-positioning systems for the most demanding applications in photonics, packaging, test, micro machining, government, measurement, medical and semiconductor manufacturing.