6-axis parallel-kinematic high vacuum (HV) hexapod nano-positioning system
AI-HEX-HR2-UHV Alio

ALIO has quickly become a world leader with nano-precision vacuum stage and robotic systems. All ALIO products with exception of the air bearing systems are UHV compatible. Linear, rotary, open center X-Y, Hexapods, Tripods and goniometer stages and systems are available in HV (e-7 TORR) or UHV ( e-10 TORR) with ultra low outgassing material and components all carefully prepared and baked.

Nanometer management of motion is becoming more pervasive in industry as leading edge technology pursues a common trend of working on smaller and smaller scales. This trend is prevalent in numerous positioning sensitive industries, such as fiber optics, bio medical, micro machines, electronics, semiconductor, energy, optics, aerospace, Synchrotrons as well as other research and development.