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XY stage

Air bearing XY stage

Leading the World with nano-precision XY planar air bearing systems. ALIO has also developed several air bearing systems for linear, rotary and our patent pending X-Y Planar System. ALIO linear air bearing systems utilize dovetail and custom designs to exceed nano precision applications. Linear Dovetail Air Bearings Systems using NewWay Dovetail Bearings. These systems are available with ceramic servo motors or ironless cogless linear servo motors depending on your application needs. - Up to 600 mm standard dovetail - Custom systems up to 3 meters - Linear Motor or Ceramic Servo Motors - Class 1 Clean Room compatible - Standard flatness of 0.25 microns per 25 mm of travel

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