Increased demands for True NANO ™ metrology and process lead ALIO to design and manufacture the NANO Z™ patent pending Z lift air bearing stage to exceed all past design issues of tip and tilt while increasing the accuracy to less than 100 nanometers with standard Renishaw Invar encoders. The counterbalance NANO Z™ can easily hold heavy vacuum wafer chucks and still excel with nano precision over 24 mm of travel.
