Custom rotary positioner
max. 270°/s | AI-80R-Q Alio

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  Multi-axis motion controller
  

Positioning and micro-positioning stages

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  6-axis parallel-kinematic hexapod micro-positioning system
  max. 200 mm/s | AI-HEX-HR2
  
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  Air bearing XY stage
  NANO Z™
  
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  Rotary positioner
  max. 270°/s, 360° | AI-80R-D
  
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  Custom air bearing positioning stage
  
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  3-axis parallel-kinematic tripod nano-positioning system
  max. 200 mm/s | AI-TRI-HR4
  
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  Air bearing rotary positioning stage
  
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  Ultra high vacuum (UHV) 6-axis positioning stage
  
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  Linear positioning stage
  max. 100 mm, max. 250 mm/s | AI-HR4-10000E XY
  
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  Open center nano-positioning stage
  max. 150 mm, max. 1 m/s | AI-LM-15000E-XY
  
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  Linear motor driven XYZ positioning stage for nano-machining
  max. 200 mm
  
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  Open center ultra high vacuum (UHV) XY positioning stage
  max. 150 mm, max. 1 m/s
  
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  6-axis parallel-kinematic high vacuum (HV) hexapod nano-positioning system
  AI-HEX-HR2-UHV
  
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  Linear servo-motor driven XY positioning gantry table
  max. 400 mm, max. 1 m/s | AI-LMR-40000-XY