Linear motor driven XYZ positioning stage for nano-machining max. 200 mm
Alio
ALIO Industries engineers and manufacturers nano resolution linear stages for stand alone motion systems or stackable axes in various serial kinematic structures. The standard stages can be modified or re engineered to meet customer needs plus these products can be interfaced to existing customer controllers or ordered with motion controllers and GUI software. Stages are available for end-user and OEM applications in atmospheric, clean room and vacuum environments requiring ultra clean, extremely precise movement with high reliability.
