PHE101M is multi-wavelength ellipsometer. Customer can select different wavelengths from UV, VIS or NIR range (up to 5 wavelengths). The PHE101M has all of the features which PHE101 has. The PHE101M is an ideal discrete wavelength ellipsometer designed for measuring the refractive index and thickness of single and multi-layer films at several wavelengths. It has the widest variable angle (20-90°) which is adjustable in steps of 5°s, with an accuracy of 0.01°. (As an option, the angle of incidence can be varied continuously.) The standard wavelength of the PHE101M is HeNe laser at 632.8 nm. The wavelength can be selected by a combination of 543 nm, 594 nm, 612 nm, 635 nm to 1164 nm. Infrared sources at 0.83, 1.31 and 1.52 mm are also available. The PHE101 is very easy to use and can be equipped with our new laser alignment tool which greatly improves the ease of use and speed of operation when compared to conventional alignment method. Features Five maximal extended wavelengths Auto change wavelength for easy operation Excellent precision and repetition Fast rotating analyzer operation Powerful software with materials library Second laser is used to make alignment most convenient and accuracy Widest variable angle 20-90° Auto focus compensates for sample topography and wafer 'bow' misalignment High stability and reproducibility of measured angle better than 0.01° Excellent precision and repetition