laser ellipsometer / mono-wavelength
632.8 nm | PHE101
The PHE101 is a wavelength ellipsometer. The device has a high accuracy and repetition due to its new features. The device operates through a fast rotating analyzer. It has a powerful software consisting of materials library. The device has a 20 to 90° variable angle.
The device consist of an auto focus which for the topography and wafer misalignment. The device has a large sample stage. It can measure speed in less than 1 second. PHE101 can be used easily. It can fit the new laser alignment tool for a more improved speed operation.