Angstrom Sciences magnetrons are recognized as the new standard of the sputtering industry. Because, in addition to the advanced features provided by the Angstrom AdvantageTM, they offer a host of other performance efficiencies as well.
Versatile Design
Their ultra compact design makes them ideal for virtually any new or retrofit application including the most complex multiple-cathode cluster or the smallest vacuum chamber. Low-impedance heads provide RF, DC, mid frequency DC, and pulse DC power capability. All utilities are maintained at atmosphere and are accessed through standard o-ring compression fittings for ease of installation in any vacuum system.
Lower Pressure, Higher Power
All our magnetrons operate at extremely low pressure, in the 10-4 Torr range and can deliver practical power densities in excess of 300 watts per square inch.
High Rates and Performance
That means they can coat a greater area for their cathode size than other magnetrons. So you can maximize both your coating zone and your target utilization without the kind of trade-off in rate that other magnetrons force you to make.
Greater Performance
Yet these same advanced planar magnetrons can give you target utilization as high as 50%. Our magnetrons also deliver much greater uniformity of deposition – routinely in the 3 to 5% range. One of our research customers has even documented uniformity of 0.1% with Angstrom Sciences magnetrons.
Full Range of Sizes
Angstrom Sciences circular magnetrons are available in 1-16 inch target sizes. The linear magnetrons are available in target widths of 1.5 to 12 inches and in target lengths from 1 to 20 feet.
