Planar magnetron for ion sputtering
Angstrom Sciences
Angstrom Sciences' magnetrons are engineered to meet stringent thin film uniformity, target utilization, and sputter rate specifications. In addition to the advanced performance results provided by the profiled magnets and turbulent water flow of the Angstrom Advantage™, Angstrom Sciences' magnetron sputtering cathodes offer a host of other efficiencies.
Versatile, Compact Design
ONYX® magnetron sputtering cathodes are ultra compact and specially designed for compatibility with complex multi-cathode cluster assemblies. This versatile construction allows scalability, making ONYX® magnetrons an ideal option for system upgrades and retrofit applications.
Total Power Compatibility
Low impedance sputter heads are RF, DC, mid-frequency DC, pulsed DC, and microwave power compatible.
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