Air bearing XY stage
50 x 50 mm | Microglide™ T50E
Anorad
- High Dynamic Performance with Linear Motor Drives
- Angular Deviations < 1 arc-sec
- Class 10 Cleanroom Operation
Through the integration of advanced technologies and innovative design, Anorad has developed the Microglide T50E, a dual axis stage for motion applications that require nanometer positioning accuracy and critical velocity control in compact design. Utilizing optically flat air bearings, brushless linear motors and lightweight and rigid ceramic beams, flatness and straightness specifications of 0.3 micron are achieved.
The non-contact design offers the qualities of both high reliability and clean room compatibility. Feedback from the high resolution interferential linear encoders results in a resolution of < 8 nanometers. Pre-mapped accuracy of 0.15 micron and 3 sigma repeatability of 0.13 micron is achieved.
This XY stage is ideal for high throughput applications such as rapid prototyping, laser micromachining or ablation, vision inspection and multi-chip module interconnect fabrication.
Specifications Over Full Travel
- Travel XY: 50 mm x 50 mm
- Resolution: 0.0078 µ m /count
- Repeatability (3 Sigma): < 0.13 µ m
- Accuaracy of Average Position: < 0.15 µ m
- Flatnes and Straightness (full travel): < 0.3 µ m
- Speed: To 50 mm/sec
- Load Carrying Capacity: 1 kg
- Acceleration: .15 g's
