Precision vertical lift table
max. 12 mm | Z-wedge
Anorad
- Ballscrew drive provides high stiffness and excellent stability
- Glass scale encoder for ultra-high resolution feedback
- Repeatable to ±0.5 um
- Rugged aluminum construction for lightweight and great value
- Cross roller linear bearings provide smooth motion and maximize rigidity
- Maximum travel 12 mm
Ideal for:
- Autofocus stages
- Wafer scanning
- 360 degree access to workpiece
- Application optimized designs possible
The Anorad Z-Wedge provides high precision motion control for vertical applications requiring 360-degree workpiece access. The stage design has been optimized for smoothness and rigidity by careful engineering of all critical positioning components.
A precision ground ballscrew, mounted in rigid support bearings, provides extremely repeatable position control. A stiff metallic bellows-type coupling attaches the ballscrew to the drive motor to minimize angular deflections and maximize system response. The vertical lift stage rides on a set of high precision, preloaded ultra-smooth crossed roller bearing ways to permit extremely fine mechanical resolution. Resolution is further enhanced by collecting feedback information from a highly stable, glass scale encoder with a signal interpolator that provides nanometer level electrical resolution. Pure vertical motion is assured by a second set of ground linear guides along the Z-axis.
The net result of all this engineering expertise is a compact, rigid yet lightweight stage that offers excellent stability, resolution and speed control.
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