loading in progress... Please wait

www.axcelis.com
Selected product 
ion implanter

Ion implanter


Complete Applications Coverage
Our evolving line comprises mid dose, high dose, and high energy platforms designed to address the continued scaling trends of implant applications to lower energy ranges. This means we have the technology to cover all critical implant applications - including all existing and emerging needs of the 65nm era and beyond. In addition, our platform is designed to provide a high degree of process overlap to provide both back up capability, and improved system ultilization...

More specifications...

Other products from -

Axcelis Technologies

 
back

soc-pmea www di En 2008-07-30-27