Semiconductor diffusion furnace
max. 300 mm
Axcelis Technologies
Allowing you to address the most demanding 300mm thermal processing applications, including ultra shallow junction beyond the 100nm technology node.
With new and improved, higher temperature furnace and control technology for reduced thermal budget processes, and the new PrecisionTempPlusTM state-of-the-art temperature measurement and control system, the Summit 300XT brings you industry-leading thermal performance beyond the 100nm node.
