Semiconductor wafer curer
RapidCure™FC Axcelis Technologies

The RapidCure FC is a standalone film curing system designed specifically for strengthening, enhancing and/or modifying the mechanical and electrical properties of advanced semiconductor films. The FC configuration is ideally suited for some of today's most sophisticated applications, including low-k and silicon nitride film curing, while maintaining the flexibility to support UV annealing and charge erasure needs.

- Axcelis' UV source advantage. Axcelis' high-intensity, microwave-driven UV light is tailored to individual film-curing applications, boosting productivity and process efficiency.
- Simple and cost efficient design. Atmospheric processing simplifies system configuration, eliminating expenses and process control issues typically associated with vacuum-based cure systems.
- Reliable. For over 20 years, Axcelis' benchmark light source design has delivered field-proven reliability.
- Better film and device performance. Tailored broadband UV spectrum enhances film quality while improving device characteristics and yield.