capacitance diaphragm vacuum gauge / without display / chemical-resistant / 4-20 mA
SPG5A/6A Azbil Europe NV



  • Technology:

    capacitance diaphragm

  • Display:

    without display

  • Other characteristics:

    chemical-resistant, 4-20 mA

  • Vacuum range:

    Max.: 100 Pa (0.014503774 psi)

    Min.: 0 Pa (0 psi)


The SPG5A-6A is a capacitance diaphragm vacuum gauge that uses a sapphire capacitance pressure sensor to achieve high accuracy and reliability, compact size, and light weight. Self-heating and nonself-heating models are available. The SPG5A/6A is especially suited for use in semiconductor manufacturing.

Uses a single-crystal sapphire for excellent resistance to corrosion and high temperatures
Highly corrosion-resistant and heat-resistant single-crystal sapphire pressure sensing material also has excellent mechanical characteristics. Capacitive measurement has high repeatability even when used at high temperature
Highly accurate measurement
Advanced signal processing technology contributes to excellent temperature characteristics and linearity of measurement
Compact and light weight
Small in size and light in weight, thanks to micromachining technology
Fast warm-up time and stable sensor temperature control
Microprocessor-based digital PID control provides fast warm-up and stable sensor temperature (self-heating models).