wafer heating element / ceramic
Bach Resistor Ceramics GmbH

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wafer heating element / ceramic wafer heating element / ceramic
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Characteristics

  • Type:

    wafer

  • Material:

    ceramic

  • Maximum temperature:

    Min.: 0 °C (32 °F)

    Max.: 1,000 °C (1,832 °F)

Description

Bach RC has developed a new Wafer Heating System for superior
temperature uniformity and fast heating rates up to 10°C/sec. The Wafer
Heating Chuck uses ceramic heaters and ceramic thermal insulation for
the operation in atmosphere or vacuum. Different configurations of
Heating Chucks can be used up to 500°C or 1000°C. Additional features
like vacuum chucking or electrostatic chucking as well as a cooling
function can be added to the system on request. The ceramic Heating
Chucks can be equipped with multizone heaters with any number of heating
zones. Along with the Wafer Heating System we provide highly precise
temperature measurement and control systems.