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vibration monitoring system

Vibration monitoring system


It is typically necessary to conduct measurements at the location of the future installation of ultra-accurate 3D measurement machines in order to guarantee that existing floor vibrations do not exceed the maximum allowed values. Vibrational accelerations are measured within a defined frequency range, (1-100 Hz) as a simple sum value measurement cannot provide a sufficient amount of information about the exact conditions. Evaluation of the force-distance signal is conducted with a Fast Fourier Analyzer that displays a measured value for each frequency of the spectrum. (vibration acceleration in g) In case the disturbances (vibration immissions) exceed the permissible range, our PC calculation software can help to ascertain the suitable isolation. Very precise vibration analysis in the lower frequency range can be conducted with a highly-sensitive geophone. Vibration speeds of under 0.01µm/s in the range of 0.2 to 30Hz can be recorded with a geophone. Especially in the semiconductor, nanotechnology, and ultra-precise 3D measurement industries it is necessary to conduct very precise vibration measurements in order to guarantee an optimal and client-specific configuration.


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