Ultra Purity Product standards: Technical indicators: Working pressure: 10kg/ c Durability test: 5000 cycles Inboard leaking rate: 1x 10-9 atm cc/sec Internal leaking rate: 1x 10-9 atm cc/sec Outboard leaking rate: 1x 10-9 atm cc/sec Performance demand: The leaking rate meets the SEMI F1 standards under the technical indicators circumstances mentioned above.
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