Compact electric linear actuator Bookham

The Model 8330 Picomotor actuator Ultra was designed specifically to minimize contamination and outgassing in clean-critical environments including vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) applications. A special sealed bellow ensures the cleanliness of the actuators throughout its travel range. The actuators are ideal for precision motion-control and beamsteering applications in the semiconductor industry or in scientific laboratories down to pressures as low as 10- 9 Torr.

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