mass flow meter / thermal / for gas / digital
IQ+FLOW® series Bronkhorst



  • Technology:

    mass, thermal

  • Fluid:

    for gas

  • Other characteristics:

    digital, ultra-compact, economical, in-line

  • Process pressure:

    Min.: 0 bar (0 psi)

    Max.: 10 bar (145.04 psi)

  • Volumetric flow rate:

    Min.: 0 l/min (0 us gal/min)

    Max.: 5 l/min (1.3 us gal/min)


Bronkhorst High-Tech has developed the IQ+FLOW® mass flow sensor working closely with a leading Dutch institute, TNO-TPD Institute of Applied Physics. The sensors serve equipment manufacturers' need of a compact solution for monitoring or controlling the gas flow or pressure.

In past, conventional mass flow meters/gas controllers required a footprint of 1.5", for example as outlined in the NeSSI™ system. In contrast, using micro solid state technology (MEMS), Bronkhorst has been successful in halving the required footprint to 0.75". This has helped achieve ultra compact flow/pressure meters and controllers resulting in huge space savings.

IQ+FLOW® is of very high quality. It can handle flow ranges from 0,2...10 mln/min up to 0,1...5 ln/min, full scale values. The thermally-balanced chip sensor provide a highly stable Zero. The solution is highly affordable with a low ownership cost. It offers a very quick response, down to 300 msec. This has both analog and digital (RS232 or RS485) communication capability.